Siemens Aktiengesellschaft

Wilhelm Argyo

Erich Plies

A deflection element for an electrostatic opposing field spectrometer includes a grid electrode at a positive potential and a deflection electrode at a negative potential disposed symmetrically thereto, as well as housing portions disposed between the grid electrode and the deflection electrode, so that together they form a generated surface of a hollow cylinder disposed concentric to an optical axis of the spectrometer.

Electrostatic opposing field spectrometer for electron beam test methods

A carbon-containing layer is produced on a substrate by means of sputtering. The carbon-containing layer is applied with good adhesion to nearly any substrate, is a very thin layer, and also exhibits a low conductivity. Parts of hydrocarbon molecules or hydrocarbon molecules are both incorporated into the carbon-containing layer during sputtering. The carbon-containing layer adheres well to nearly any substrate, is nearly scratch-proof, and helps avoid charging and contamination upon bombardment with charged particles.

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Munich, Georgia

Wilhelm Argyo