Carl Zeiss Smt Gmbh

Wilheim Ulrich

Hans-Juergen Mann

Hartmut Enkisch

Stephan Muellender

An imaging optical system has a plurality of mirrors. These image an object field in an object plane into an image field in an image plane. In the imaging optical system, the ratio of a maximum angle of incidence of imaging light) on reflection surfaces of the mirrors and an image-side numerical aperture of the imaging optical system is less than 33.8&#xb0;. This can result in an imaging optical system which offers good conditions for a reflective coating of the mirror, with which a low reflection loss can be achieved for imaging light when passing through the imaging optical system, in particular even at wavelengths in the EUV range of less than 10 nm.

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Aalen, Germany

Wilheim Ulrich