Sitec Gmbh

Gtat Corporation

Centrotherm Sitec Gmbh

Aeg Svs Power Supply Systems Gmbh

Aeg Power Solution B.v.

Aeg Power Solutions Bv

Wilfried Vollmar

Michael Harro Liese

Casey Michael Wornath

Michael-Harro Liese

A method and system of igniting one or more filaments for silicon production includes applying an output voltage to the one or more filaments using a transformer connected with the one or more filaments. In addition, the method includes supplying, in combination with the application of the output voltage, a current to a primary winding of the transformer via a choke to limit the current to a first predetermined current threshold range. The combination of the supplied current and applied output voltage allows a predetermined output range to be generated from a power supply device initially required to ignite the one or more filaments.

Cold filament ignition system and method of silicon rods

A method and a device for igniting silicon rods outside a CVD-reactor. A silicon rod is disposed inside a chamber of a casing of an ignition device. At least one pair of contact electrodes applies a first voltage supplied by a transformer with an open circuit voltage sufficiently high to initialize a current flow in and ignite the silicon rod. Optionally, the silicon rod may be heated by a current flow and/or an external heating unit to a temperature within a predetermined range. The silicon rod is removed from the ignition device and may be exposed to a depositing process inside a CVD-reactor. The ignition of the silicon rod outside the CVD-reactor facilitates a new ignition for the depositing process.

Method and apparatus for igniting silicon rods outside a CVD-reactor

An apparatus and method for applying a voltage across silicon rods in a CVD reactor has a series connection wherein the silicon rods may be inserted as resistors A first power supply unit has first transformers connected with one silicon rod. A second power supply unit has second transformers connected to the same number of silicon rods as the first transformers in parallel to one or more of the first transformers. The second transformers have an open circuit voltage lower than the first transformers and a short circuit current higher than the first transformers. A third power supply unit has outputs connected with the silicon rods in parallel to the first and second transformers. The third power supply unit is capable of providing a current in a voltage range below the open circuit voltage of the second transformer and higher than the short circuit current of the second transformer.

Apparatus and method for supplying electric power to a CVD-reactor

A method and arrangement for phase-fired control is provided, in which all controllable electric switching elements are linked by a common controller that has a first input for a first control signal. A set point value is pre-defined as a first input variable and assigned to a device for controlling the controllable electric switching elements. Current flowing through each switching element is measured and transmitted to the device for controlling the switching elements as a respective second input variable. The current value of the voltage in the load is measured and transmitted to the device for controlling the switching elements as a third input variable. The device for controlling the switching elements controls all switching elements in a targeted manner by use of the first, second and third input variables. A maximum of two switching elements are active at any one time.

Phase-fired control arrangement and method

Disclosed is a circuit arrangement for supplying variable loads (I, I, M, M, O, O, O) from three phases (L, L, L), with a circuit arrangement having four groups of terminals (A, A, A, A; A, A, A, A; A, A; A, A, A) for the loads (I, I, M, M, O, O, O) which are subsequently designated as terminal groups; the circuit arrangement is suitable and set up for supplying the terminals (A, A, A, A) of the second terminal group from the first phase (L); the circuit arrangement is suitable and set up for supplying the terminals (A, A, A) of the fourth terminal group from a second phase (L); the circuit arrangement is suitable and set up for supplying the terminals (A, A, A) of the first terminal group and the third terminal group (A, A) from a third phase (L); the circuit arrangement is suitable and set up for controlling the voltage of the four terminal groups, and exhibits three control loops for this purpose.

Circuit arrangement for supplying variable loads from three phases

The invention relates to a first circuit arrangement (E) for supplying variable loads that can be connected to the first circuit arrangement (E) from a first current or voltage source (MV) in a first state of the first circuit arrangement having the following features: the first circuit arrangement (E) has a first terminal and a second terminal for connection to the first current or voltage source (MV) and a third terminal, at least one fourth terminal and at least one fifth terminal for connection to a second current or voltage source (Z); the second terminal is at a reference potential; the first circuit arrangement (E) has at least one eighth terminal for connection to two loads (R; R); the first circuit arrangement (E) has controllable switching means for changing over between the first state and a second state; in the first state, the at least one eighth terminal for connection to the two loads (R, R) is connected to the first terminal and the third terminal and the fifth terminal are connected to the reference potential, in the second state, the at least one eighth terminal is connected to the fourth terminal.

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Soest, Germany

Wilfried Vollmar