Commissariat a L'energie Atomique Et Aux Energies Alternatives

Centre National De La Recherche Scientifique

Commissariat a L'energie Atomique

Commissariat À L'énergie Atomique Et Aux Énergies Alternatives

Université Paul Sabatier (toulouse Iii)

Wilfried Rabaud

Salim Boutami

Pierre Imperinetti

Alexandre Mary

Geoffroy Dumont

Agnès Arnaud

Stéphane Pocas

Jean-Louis Ouvrier-Buffet

Jean-Jacques Yon

Philippe Tailhades

Stephane Pocas

Bruno Mauvernay

Lionel Presmanes

Ujwol Palanchoke

Corinne Bonningue

A bolometric detector of LWIR wavelengths, including:

Bolometric detector with MIM structures of different dimensions

The invention relates to the use of a material having a spinel ferrite/iron monoxide structure as a sensitive material in the form of a thin film for the bolometric detection of infrared radiation, the chemical composition of said structure, excluding doping agents that may be present, having empirical formula (I): (FeM)O, where x is strictly less than 1 and strictly greater than 0.75. The invention also relates to a bolometric device for infrared radiation detection and infrared imaging, comprising at least one sensor provided with a sensitive element in the form of a thin film as defined above.

Use of a combination of iron monoxide and spinel oxides as a sensitive material for detecting infrared radiation

This bolometric array detector for detecting electromagnetic radiation in a predetermined range of infrared or terahertz wavelengths comprises a substrate and an array of bolometric micro-plates for detecting said radiation that are suspended above the substrate by support arms. It comprises a metallic membrane located above and around each micro-plate and in which openings are formed; said openings in metallic membrane are periodically located in it along at least one predetermined axis with a period equal to or less than where &#x3bb; is a wavelength in the wavelength range that is to be detected and n is the average refraction index of the medium that separates the micro-plate from metallic membrane.

Infrared detector based on suspended bolometric micro-plates

The electromagnetic radiation detection device includes, on a same substrate:

Device for detecting an electromagnetic radiation

A bolometric array detector for detecting electromagnetic radiation in a predetermined range of infrared wavelengths includes a substrate; an array of bolometric micro-plates for detecting the radiation suspended above the substrate by support arms; and metallic reflectors formed on the substrate underneath the micro-plates to reflect that portion of the radiation which has passed through said micro-plates without being absorbed by the latter. For each micro-plate, a corresponding reflector includes a first part located underneath the micro-plate which extends as a second part not positioned underneath the micro-plate. At least the second part has surface texturing in a repeating pattern for coupling a portion of incident radiation on the second part to a guided wave that propagates towards the first part of the reflector positioned underneath micro-plate.

Growing community of inventors

Moirans, France

Wilfried Rabaud