Institut Fur Mikrotechnik Mainz Gmbh

Omicron Vakuumphysik Gmbh

Wilfried Noell

Alexander Ruf

Peter Guthner

Karsten Mayr

An optical near-field probe (1) includes a carrier component (10), which carries a tip (40), and has only one membrane (11, 20), transparent at least in the area of the tip (40), which is mounted on the light emission surface (9) of an optical waveguide (2) that is made of a rigid material such as glass or plastic. The dimensions of the membrane (11, 20), at least in one direction in the membrane plane, are less than or equal to the diameter of the optical waveguide (2). To position the tip (40) over the core (3) of the optical waveguide (2), optical methods can be used or the membrane and optical waveguide can be provided with locating elements.

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Frankfurt-am-Main, Germany

Wilfried Noell