Mazet Gmbh

Wilfried Krueger

Gunter Siess

Marcus Roeppischer

A sensor arrangement with a silicon-based optical sensor, particularly color sensors for colorimetric applications is disclosed. The invention aims to find a novel possibility for suppressing interference ripples occurring in optical sensors when adding substrates with optically functional coatings which permits a simple production without complicated adaptation layers. The sensor passivation is composed of a combination of thin SiOlayer in the range of 5 to 10 nm and an antireflection-matched SiNlayer and a substrate which carries at least one optical filter is arranged over the sensor passivation and connected to the sensor by means of an adhesive and forms an intermediate space between sensor surface and optical filter which is filled with an optical medium having a low refractive index (n) and a height variation (&#x394;h) over the associated sensor surface.

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Erfurt, Germany

Wilfried Krueger