U.S. Philips Corporation

Wihelm A Groen

Gijsbertus De With

Marcellinus J Kraan

Paulus F Van Hal

The invention relates to a substrate made from a novel type of ceramic material. This material comprises 44-47 at. % Al, 31-39 at. % O, 8-13 at. % C and 8-12 at. % N. Substrates made from this material exhibit a relatively high heat conductance, a relatively great strength and their coefficient of expansion is equal to that of Si. Consequently, the substrates in accordance with the invention are very suitable for use in the Si-semiconductor technology. The main component of the ceramic material of the substrates preferably corresponds to the formula Al.sub.28 O.sub.21 C.sub.6 N.sub.6. The invention also provides methods of manufacturing substrates and other mouldings from this material.

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Eindhoven, Netherlands

Wihelm A Groen