Illinois Water Treatment, Inc.

Wesley R Carrera

James L Filson

Ramesh R Bhave

Ceramic filtration of a feed solution of ultra pure water and particle contaminants is disclosed through a metal oxide membrane on ceramic support. In one aspect, the filtering of ultra pure water from a feed solution containing ultra pure water and contaminant particles includes passing the feed solution cross-flow through a multi-channel sintered monolithic metal oxide membrane on ceramic support to form a permeate of particle-free ultra pure water. The sintered metal oxide membrane has a nominal pore size in the range of about 50 to 200 Angstroms. Although high recoveries per pass rates were used, no detectable aluminum ions were found in the ultra pure water. In another aspect, the apparatus and process of the present invention for filtering ultra pure water includes cross-flow filtration using multichannel monolithic ceramic membranes at suitable pore sizes in a total chemical process system including ozonation sterilization of the ceramic membrane particle filter in water purification applications for electronics manufacturing.

Growing community of inventors

San Antonio, TX, United States of America

Wesley R Carrera