Emerson Electric Company

Other

Rosemount Inc.

Sund, Wesley E.

Wheeler, Matthew G.

Mcnulty, Daniel P.

Pawlas, Gary E.

Scott, Timothy W.

Whiteley, Jeffrey L.

Dille, Joseph C.

Barger, Michael J.

Wesley E Sund

Joseph C Dille

Gary Edward Pawlas

Michael J Barger

Fred Charles Sittler

Jeffrey L Whiteley

John E McIntire

Matthew Glen Wheeler

Timothy W Scott

Daniel Patrick McNulty

Christina A Grunig

Christina A Nord

Daniel P Mcnulty

Gary E Pawlas

John Mcintire

A fluid delivery system includes a flow control device and a Coriolis mass flowmeter in fluid communication with the flow control device. The Coriolis flowmeter has a flow-tube made of a high-purity plastic material, such as PFA, making the delivery system suitable for high purity applications. A controller provides a control output signal to the flow control device, which may comprise a pinch valve, so as to vary the flow control device output in response to a setpoint signal and measurement signals received from the flowmeter.

High purity fluid delivery system

An improved pressure transducer is disclosed. The transducer includes a connector, an enclosure, a sensor portion, and an external heater disposed to heat the sensor portion. In some aspects, the sensor portion includes a sensor constructed from a brittle material and does not employ any fill fluid within the sensor. In another aspect, the invention includes a kit that adapts non-heated high purity vacuum transducers for heated use. The kit includes a connector portion and a heater portion that is coupled to the connector portion. The connector portion may also include one or more indicators.

Pressure transducer with external heater

A mass flow measurement and control device includes an enclosure with a Coriolis mass flowmeter situated therein. The Coriolis mass flowmeter has a flow-tube made of a high-purity plastic material, a driver coupled to the flow tube for vibrating the flow tube, and a pickoff coupled to the flow tube for sensing Coriolis deflections of the vibrating flow tube. A pinch valve includes an elastomeric tube made of a high-purity plastic material in fluid communication with the flow tube. An actuator with a ram operatively connected thereto is situated adjacent the elastomeric tube, and a reference surface is positioned generally opposite the ram such that the elastomeric tube is squeezable between the ram and the reference surface. A controller may also be provided, which receives an output signal from the Coriolis flowmeter and provides a control output signal to the pinch valve actuator in response to the flowmeter output signal and a setpoint signal.

High purity coriolis mass flow controller

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Eden Prairie, MN, United States of America

Wesley E Sund