Leybold Optics Gmbh

BÜhler Alzenau Gmbh

Werner Weinrich

Harro Hagedorn

Walter Zultzke

Eckhard Wirth

Rudolf Beckmann

Markus Fuhr

Alfons Zöller

Tobias Gross

Alfons ZÖLLER

A test glass changer for optically measuring layer properties in a vacuum coating system including a movable substrate holder for guiding a substrate through a stream of coating material; a mount connected to a rotary spindle and rotatable relative to the substrate holder about the rotary spindle; and a control device directing a test glass element into a ray path of an optical measuring device and into a stream of the coating material. The mount has at least two recesses offset eccentrically with respect to the spindle for one test glass element in each case. The control device can induce a rotational movement of the mount about the spindle. The centering device can exert a torque and holding moment on the mount to bring a test glass element arranged in one of the recesses into a measuring position of the measuring device. Related methods are also provided.

Test glass changing

The invention relates to a plasma source whose plasma is ignited by an electric voltage. To be able to carry out the ignition at relatively low voltages, a plate () provided with holes () is provided beneath a plasma volume (), which is disposed above a wall () of a plasma chamber (). Through this plate () an ignition volume () is formed beneath the plasma volume () with a higher pressure than in the plasma volume (), in which the plasma ignites first. The ignition is subsequently propagated through the holes of the plate () into the plasma volume ().

Plasma source with reliable ignition

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Langenselbold, Germany

Werner Weinrich