Helmut Fischer Gmbh Institut Fur Elektronik Und Messtechnik

Werner Volz

Paul Boos

Henry Thiele

A vacuum chuck for clamping workpieces, in particular wafers, and a measuring device and a method for checking workpieces by way of X-ray fluorescent radiation. The vacuum chuck has a clamping plate having a support surface, having at least one suction connection arranged on a base body for connecting to a negative-pressure device and for clamping the workpiece on the clamping plate by negative pressure received by the base body and having several suction grooves arranged in the clamping plate and are open towards the support surface. The support surface has concentric suction grooves having a suction opening to which a negative-pressure line is connected or which is connected to a work channel. Each suction groove having a separate negative pressure, which is separate to the adjacent suction groove, is selectively controlled by a control valve by a control for supplying the respective negative pressure in the respective suction groove.

Vacuum chuck for clamping workpieces, measuring devices and method for checking workpieces, in particular wafers

A measuring probe for the measurement of the thickness of thin layers, includes a housing, at least one sensor element which is mounted with at least one spring element to be flexible with respect to the housing, the sensor element having a spherical positioning cap pointing towards the measuring surface of an object of measurement against a touchdown direction and along a longitudinal axis thereof, and an attenuating device on the housing which acts in the touchdown direction of the at least one sensor element before the sensor element is fitted onto the measuring surface of the object of measurement and attenuates the touchdown movement of the at least one sensor element in the direction of the measuring surface of the object of measurement.

Measuring probe with attenuating device for measuring the thickness of thin films

The invention relates to a device to position and align a rotationally-symmetrical body () with respect to a measuring device () for the implementation of a measurement on the rotationally-symmetrical body (), having a basic element () which has a contact surface () on a pin () or is allocated to a contact surface () on which the rotationally-symmetrical body () is supported for the implementation of the measurement, wherein a positioning element () which can be moved relative to the contact surface () is provided on the basic element (), said positioning element () comprising a prismatic receiver (), wherein the contact surface () is positioned within the prismatic receiver () or abuts on this and a movement path of the positioning element () towards the basic element () corresponds at least to the height of the prismatic receiver ().

Growing community of inventors

Sindelfingen, Germany

Werner Volz