Leybold Optics Gmbh

Leybold-heraeus Gmbh

Werner Klug

Alfons Zoller

Michael Boos

Harro Hagedorn

Christopher Schmitt

Hans Dirk Wolf

The invention concerns an optical monitoring system for the measurement of layer thicknesses of thin coatings applied in a vacuum, particularly on moving substrates, during the coating process, in which the light intensity of the light of a light source injected into a reference light guide and released by a first piezoelectric or electrostrictive or magnetostrictive light chopper is registered by a light detector unit in a reference phase, the light of the light source in a measuring phase is injected into a first measuring light guide and the light released by a second piezoelectric or electrostrictive or magnetostrictive light chopper is directed to the substrate, and the light intensity of the light reflected or transmitted from the substrate is registered by the light detector unit through a second measuring light guide, and a remaining light intensity is registered by the light detector unit in at least one dark phase, wherein the reference phase, the measuring phase, and the dark phase are shifted in time by the light chopper and are digitally adjusted depending on the position of the substrate.

Optical monitoring system for coating processes

The invention concerns a measuring system for optical monitoring of coating processes in a vacuum chamber, in which the light source is arranged inside the vacuum chamber between the substrate carrier and a shutter is arranged beneath the substrate carrier and the light-receiving unit is arranged outside the vacuum chamber in the optical path of the light source. The substrate carrier is designed to accept at least one substrate, and it can move across the coasting source in the vacuum chamber, preferably revolving about an axis, whereby the substrate or substrates cross(es) the optical path between the light source and the light-receiving unit for transmission measurement, and the shutter shades a measurement area across the coating source.

Measuring system for optical monitoring of coating processes

A photometer in which a measuring phase, a reference phase and a dark phase are produced by means of a chopper. These phases are staggered in time, so that a single detector can be provided for all phases. In the photometer the object to be measured is situated between two light conductors, the one light conductor leading to the detector and the other light conductor leading to the chopper input. The chopper output is carried by an additional light conductor to the detector.

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Freigericht, Germany

Werner Klug