Imec Vzw

Katholieke Universiteit Leuven

Universiteit Hasselt

Wenya Song

Tom Aernouts

Stijn Lammar

Yinghuan Kuang

A method for forming an intermediate structure in the formation of an optoelectronic device in provided. The method includes: a) obtaining a stack of layers over a substrate holder in a sputtering chamber, the stack of layers comprising an active layer comprising an active material having a perovskite crystal structure, an n-type semiconducting layer comprising a fullerene over the active layer, and an energy alignment layer comprising a lithium halide, a magnesium halide AlOor a metal fluoride on, and in contact with, the n-type semiconducting layer, wherein the energy alignment layer comprises an exposed top surface, and b) sputtering an n-type semiconducting metal oxide layer on the exposed top surface of the energy alignment layer, wherein said sputtering is performed at a sputtering power density of at most 1 W·cmand at a temperature of the stack of layers of at most 100° C.

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Heverlee, Belgium

Wenya Song