Lumentum Operations LLC

Jds Uniphase Corporation

Wenlin Jin

John Michael Miller

Barrie P Keyworth

Gonzalo Wills

Abdul Jaleel K Moidu

Yuan Ma

Jiamin Zheng

Stephen Bagnald

David R Hess

Edward Wang

Barthelemy Fondeur

Jinxi Shen

Shane H Woodside

Pierre D Wall

Roozbeh Ahmadi

David J Chapman

Niki Liu

Jason Blechta

Chi-li-ma Harnold

Maziar Moradi

A micro-electro-mechanical system (MEMS) device includes a mirror; at least one hinge; an electrostatic comb structure; and a control device. The control device causes, for a period of time, a voltage to be supplied to the electrostatic comb structure to cause the electrostatic comb structure to tilt the mirror about the at least one hinge in a particular direction. The control device causes, after the period of time and at an instant of time, the voltage to cease being supplied to the electrostatic comb structure. A tilt angle of the mirror, at the first instant of time, is less than a maximum tilt angle of the mirror in the particular direction. An angular momentum of the mirror, at the instant of time, is greater than zero kilogram meters squared per second in the particular direction.

Controlling one or more electrostatic comb structures of a micro-electro-mechanical system device

A micro-electro-mechanical system (MEMS) device may comprise a first layer that includes a stator comb actuator; a second layer that includes a rotor comb actuator; a mirror structure that includes a mirror; and a first set of hinges and a second set of hinges configured to tilt the mirror structure about a first axis of the MEMS device based on a driving torque caused by the stator comb actuator engaging with the rotor comb actuator. The first set of hinges may be configured to resist a lateral linear force on the mirror structure in a direction associated with the first axis caused by the stator comb actuator engaging with the rotor comb actuator. The second set of hinges may be configured to resist an in-plane torque on the mirror structure about a second axis of the MEMS device caused by the stator comb actuator engaging with the rotor comb actuator.

MEMS device with a dual hinge structure

A vertical comb drive assembly may include a rotor assembly. The rotor assembly may include a comb anchor to attach the rotor assembly to a base, a comb rotor attached to the comb anchor, and a movable element attached to the comb rotor. The vertical comb drive assembly may include a stator assembly. The stator assembly may include a plate anchor to attach the stator assembly to the base, a plate, wherein the plate forms a comb stator, and a plate hinge to connect the plate to the plate anchor. The plate hinge and the plate may be configured for moving the plate from a first position where the comb rotor and the comb stator are both in a first plane to a second position where the comb rotor is in the first plane and the comb stator is in a second plane.

Self-aligned vertical comb drive assembly

A linear comb drive may include a stator. The linear comb drive may include a rotor. At least one of the stator or the rotor may include a comb with one or more horizontally-extending fingers that have a tooth-shape formed by one or more prongs that extend vertically from the one or more fingers in a plane formed by the one or more fingers.

Linear comb driver with non-uniform fingers for alignment stability at discrete positions

In some implementations, a liquid crystal on silicon panel includes a backplane with an electrical contact formed on the backplane, a first alignment layer disposed on the backplane and interfacing with the electrical contact, a conductive layer that is light transmissive, a second alignment layer disposed on the conductive layer, and a plurality of beads in an electrically-conductive adhesive between the first alignment layer and the second alignment layer. Electrically-conductive particles within the electrically-conductive adhesive may make the electrically-conductive adhesive electrically-conductive. A first set of the electrically-conductive particles may puncture the first alignment layer to contact the electrical contact, and a second set of the electrically-conductive particles may puncture the second alignment layer to contact the conductive layer. An electrical connection of the electrical contact and the conductive layer may be via a plurality of the electrically-conductive particles.

Liquid crystal on silicon panel with electrically-conductive adhesive

An optical device may include a lens system. The optical device may include a first scanning component to receive an optical beam and to scan the lens system with the optical beam. The optical device may include a second scanning component to receive the optical beam from the lens system and to scan a field of view with the optical beam, where the lens system is positioned between the first scanning component and the second scanning component. The lens system may include a beam expander.

Optical device having two scanning components

A micro-sized optical device may comprise a mirror suspended on a set of hinges that are mounted to the substrate and that are configured to tilt the mirror about an axis, wherein a hinge of the set of hinges is a two-layer structure with a pivot point that aligns with a mass center of the mirror; and a three-layer comb actuator structure associated with the hinge of the set of hinges, wherein the three-layer comb actuator structure includes a rotor comb actuator, a first stator comb actuator, and a second stator comb actuator.

MEMS device with a three-layer comb actuator structure and a two-layer hinge

A micro-electro-mechanical system (MEMS) device may include a mirror structure suspended from a first hinge and a second hinge that are arranged to enable the mirror structure to be tilted about a tilt axis. The mirror structure may include a first actuator and a second actuator located on opposite sides of the tilt axis. The MEMS device may include a fixed electrode coupled to first actuator to cause the mirror structure to tilt about the tilt axis in a first direction based on a fixed voltage applied to the fixed electrode. The MEMS device includes a driving electrode coupled to the second actuator to cause the mirror structure to tilt about the tilt axis in a second direction opposite from the first direction based on a driving voltage applied to the driving electrode.

Electrode configuration for tilting micro-electro-mechanical systems mirror

Optical device having two scanning components, one configured to compensate for field distortion

A liquid crystal on substrate (LCOS) assembly may include an LCOS carrier. The LCOS assembly may include at least one thick layer on the LCOS carrier and associated with a threshold thickness. The threshold thickness may be at least 5 micrometers. The LCOS assembly may include a switching engine on the at least one thick layer. The switching engine may include an LCOS die and an LCOS cover glass to enclose an LCOS liquid. The LCOS assembly may be associated with a thermal sensitivity of less than 0.5 millidegrees of curvature per degree Celsius for a particular temperature range.

Thick layer for liquid crystal on silicon assembly

A diffractive MEMS device has an in-plane binary reflective diffraction pattern formed in an outer surface of a tillable platform. The binary reflective diffraction pattern includes rectangular or trapezoidal ridges and valleys, or grooves, of a same depth. The binary reflective diffractive pattern has a high diffraction efficiency even though the surfaces of the 'grooves' or 'ridges' are not perpendicular to the incoming optical beam. The diffractive pattern is supported by a pair of torsional hinges and is tiltable by an electrostatic actuator. The electrostatic actuator can include at least one side electrode for linearization of dependence of tilt angle on the voltage applied to the actuator.

Diffractive MEMS device

A diffractive MEMS device has an in-plane binary reflective diffraction pattern formed in an outer surface of a tiltable platform. The binary reflective diffraction pattern includes rectangular or trapezoidal ridges and valleys, or grooves, of a same depth. The binary reflective diffractive pattern has a high diffraction efficiency even though the surfaces of the 'grooves' or 'ridges' are not perpendicular to the incoming optical beam. The diffractive pattern is supported by a pair of torsional hinges and is tiltable by an electrostatic actuator. The electrostatic actuator can include at least one side electrode for linearization of dependence of tilt angle on the voltage applied to the actuator.

A wavelength selective device including an arrayed waveguide grating is disclosed. The wavelength selective device includes a MEMS mirror, which couples light from an input port to an elongate aperture of an input star coupler or slab of the arrayed waveguide grating. A controller tilts the MEMS mirror in response to a sensed temperature change of the arrayed waveguide grating, thereby lessening a sensitivity of the arrayed waveguide grating to the temperature change. The MEMS mirror can also be tilted to shift wavelengths of the wavelength channels of the arrayed waveguide grating by pre-defined amounts upon receiving a corresponding remote command.

Reducing temperature drift of an arrayed waveguide grating

The invention relates to a hermetic feedthrough of an optical fiber into a package for an optical module, that includes a package ferrule hermetically attached to the package or integral therewith, a fiber ferrule hermetically sealed around the optical fiber, and a compression sleeve hermetically sealed around the package ferrule. The compression sleeve is hermetically sealed to the fiber ferrule or integral therewith, and wherein a coefficient of thermal expansion (CTE) of the compression sleeve is greater than a CTE of the package ferrule so that a joint between the compression sleeve and the package ferrule is under compressive stress.

Hermetic seal between a package and an optical fiber

A multi-layer hidden hinge and actuator design for high fill factor biaxial MEMS mirror array for wavelength selective switches (WSS) based on a silicon-on-insulator (SOI) process with wafer bonding and coarsely aligned orthogonal vertical comb and/or parallel plate actuator. Each micro-mirror in the MEMS linear piano micro-mirror array comprises a micro-mirror layer, a hinge layer and an electrode/substrate layer. Preferably, the roll and tilt electrodes are substantially disposed along the roll axis to provide a high fill factor. The structure is formed by fabricating the layers separately in SOI structure and then bonding them together.

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Wenlin Jin