Changxin Memory Technologies, Inc.

Wenfeng Wang

Shuangshuang Wu

Liang Zhao

Jinping Sun

The method includes: providing a substrate, the substrate including a first region and a second region; forming an insulating layer on the substrate; etching a portion of the insulating layer in the second region, the insulating layer in the first region being configured as a first insulating layer, a remaining portion of the insulating layer in the second region being configured as a second insulating layer; forming a first barrier layer covering the first insulating layer and a second barrier layer covering the second insulating layer; etching the first barrier layer, a portion of the second barrier layer and the first insulating layer to form a through hole in the first insulating layer, and to form a hole segment in the second barrier layer; and removing the first barrier layer and the second barrier layer.

Semiconductor structure and method for forming semiconductor structure

A method for forming a capacitor includes: providing a substrate with an electric contact portion; forming a supporting layer and a sacrificial layer which are alternately laminated on a surface of the substrate, wherein the topmost layer is a supporting layer; forming a capacitor hole penetrating through the supporting layer and the sacrificial layer and exposing the electric contact portion; forming a bottom electrode layer covering an inner surface of the capacitor hole; forming a protective layer covering a surface of the bottom electrode layer; removing the sacrificial layer, during which the bottom electrode layer being protected by the protective layer; removing the protective layer; and sequentially forming a capacitor dielectric layer and a top electrode layer.

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Hefei, China

Wenfeng Wang