Massachusetts Institute of Technology

Wendi Chang

Vladimir Bulovic

Jeffrey Hastings Lang

Apoorva Murarka

Annie I-Jen Wang

Keith Adam Nelson

Harold Young Hwang

Brandt Christopher Pein

Nathaniel C Brandt

The disclosure relates to method and apparatus for micro-contact printing of micro-electromechanical systems ('MEMS') in a solvent-free environment. The disclosed embodiments enable forming a composite membrane over a parylene layer and transferring the composite structure to a receiving structure to form one or more microcavities covered by the composite membrane. The parylene film may have a thickness in the range of about 100 nm-2 microns; 100 nm-1 micron, 200-300 nm, 300-500 nm, 500 nm to 1 micron and 1-30 microns. Next, one or more secondary layers are formed over the parylene to create a composite membrane. The composite membrane may have a thickness of about 100 nm to 700 nm to several microns. The composite membrane's deflection in response to external forces can be measured to provide a contact-less detector. Conversely, the composite membrane may be actuated using an external bias to cause deflection commensurate with the applied bias. Applications of the disclosed embodiments include tunable lasers, microphones, microspeakers, remotely-activated contact-less pressure sensors and the like.

Tunable light emitting devices and applications thereof

A radiation detection technique employs field enhancing structures and electroluminescent materials to converts incident Terahertz (THz) radiation into visible light and/or infrared light. In this technique, the field-enhancing structures, such as split ring resonators or micro-slits, enhances the electric field of incoming THz light within a local area, where the electroluminescent material is applied. The enhanced electric field then induces the electroluminescent material to emit visible and/or infrared light via electroluminescent process. A detector such as avalanche photodiode can detect and measure the emitted light. This technique allows cost-effective detection of THz radiation at room temperatures.

Systems, methods, and apparatus for radiation detection

Method and applications of thin-film membrane transfer

Growing community of inventors

Annandale, VA, United States of America

Wendi Chang