Average Co-Inventor Count = 3.60
ph-index = 5
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Applied Materials, Inc. (30 from 13,684 patents)
30 patents:
1. 12424413 - Substrate support with real time force and film stress control
2. 12322633 - Electrostatic chuck with improved temperature control
3. 12074052 - Forming mesas on an electrostatic chuck
4. 11915913 - Substrate support with real time force and film stress control
5. 11854911 - Methods, systems, and apparatus for conducting chucking operations using an adjusted chucking voltage if a process shift occurs
6. 11769683 - Chamber component with protective ceramic coating containing yttrium, aluminum and oxygen
7. 11699611 - Forming mesas on an electrostatic chuck
8. 11676802 - Substrate support with real time force and film stress control
9. 11648639 - Polishing jig assembly for a new or refurbished electrostatic chuck
10. 11476146 - Substrate support assembly with deposited surface features
11. 11114327 - ESC substrate support with chucking force control
12. 11114326 - Substrate chucking and dechucking methods
13. 11054317 - Method and apparatus for direct measurement of chucking force on an electrostatic chuck
14. 10847402 - Bond protection around porous plugs
15. 10736182 - Apparatus, systems, and methods for temperature control of substrates using embedded fiber optics and epoxy optical diffusers