Hitachi High-tech Corporation

Hitachi-high-technologies Corporation

Hitachi, Ltd.

Rapyuta Robotics Co., Ltd.

Renesas Electronics Corporation

Elpida Memory, Inc.

Hitachi Hich-tech Corporation

Wen Zheng Li

Hiroyuki Takahashi

Hajime Kawano

Kazuki Ikeda

Ryo Kadoi

Makoto Suzuki

Akio Yamamoto

Shinichi Murakami

Takuma Nishimoto

Shunsuke Mizutani

Naoya Ishigaki

Masami Makuuchi

Wataru Mori

Hisaaki Kanai

Aya Ohmae

Hiroshi Oinuma

Masashi Wada

Masayoshi Takahashi

Tadanobu Toba

Masafumi Watanabe

Masahiro Toyama

Shuji Kikuchi

Tomoyo Sasaki

Takayasu Iwatsuka

Kota Toida

Hiroshi Ikeda

Atsushi Nakamura

Takahiro Jingu

Minoru Yamazaki

Norio Chujo

Yuko Sasaki

Momoyo Enyama

Makoto Sakakibara

Ritsuro Orihashi

Shahedul Hoque

Kengo Imagawa

Hideto Dohi

Yuzuru Mizuhara

Katsunori Hirano

Yuichi Sakurai

Shinji Homma

Ritsurou Orihashi

Yuji Sonoda

Masayuki Takahashi

Hisafumi Imura

Tomoharu Nagashima

Hendrik Skubch

Masazumi Tone

Takehito Kamimura

Takashi Kanesaka

Takashi Ooshima

A charged particle beam scanning module, a charged particle beam device, and a computer that can correct an INL error in a DAC circuit in real time. The charged particle beam scanning module includes a scanning controller configured to output a scanning digital signal of a charged particle beam, a DAC circuit configured to convert the scanning digital signal into a scanning analog signal and output the scanning analog signal, and an ADC circuit configured to convert the scanning analog signal into an evaluation digital signal. A sampling frequency at which the DAC circuit samples the scanning digital signal is a first frequency, and a sampling frequency at which the ADC circuit samples the scanning analog signal is a second frequency smaller than the first frequency. The scanning controller determines an output characteristic of the DAC circuit by evaluating the scanning digital signal and the evaluation digital signal.

Charged particle beam scanning module, charged particle beam device, and computer

The charged particle beam apparatus includes a charged particle source generating a charged particle beam, a deflector deflecting the charged particle beam, a detector detecting secondary electrons emitted from an irradiation target in response to irradiation with the charged particle beam, and a processor system. The processor system (A) acquires a first time-series change in secondary electron detection-related quantity by repeatedly performing the following (A) and (A), (A) directly or indirectly, maintains or changes the control amount applied to the deflector to a first control amount, and (A) acquires the secondary electron detection-related quantity based on an output from the detector, and (B) acquires a time-series change in variation of the beam diameter of the charged particle beam based on the first time-series change.

Charged particle beam apparatus

A method of setting a parameter of a charged particle beam device, for shortening the time required to adjust an ABCC parameter. An inverse conversion processing unit generates a simulator input signal corresponding to an electron emitted from a sample. A simulation detector uses an arithmetic model that simulates a detector and executes arithmetic processing on the simulator input signal in a state in which characteristic information is reflected in an arithmetic parameter. A simulated image conversion unit executes arithmetic processing corresponding to an image conversion unit and converts a signal from the simulation detector into a simulated image. An ABCC search unit searches for an ABCC parameter with respect to the simulation detector so that an evaluation value obtained from the simulated image becomes a specified reference value, and outputs the ABCC parameter as a search result to an ABCC control unit of the actual machine.

Measurement system and method of setting parameter of charged particle beam device

The disclosure provides a method and system for multi-robot route planning. The method includes determining a route plan of a node based on an order value associated with the node, wherein the order value is distance travelled from the node to one or more nodes in a network, occupying an order slot from a list of orders of the node. The determined route plan of the node is sent to the one or more nodes in the network and a new route plan is generated, based on order value threshold and wait time estimate associated with the node. The method includes optimizing the generated new route plan of the node comprising computing a new order value occupying a new order slot from the list of orders of the node in parallel to change in status of order value of the one or more nodes.

Multi-robot route planning

The invention provides a power supply module and a charged particle beam device that are capable of reducing ripple noise. A high-voltage generation circuitincludes booster circuits CPa and CPb of two systems that are configured to be symmetrical to each other, and performs a boosting operation by using a capacitive element and a diode in the booster circuits CPa and CPb of the two systems. The high-voltage generation circuit is housed in a housing and a reference power supply voltage is applied thereto. A left electrodeis fixedly provided in the vicinity of one of the booster circuits CPa and CPb of the two systems in the housing, and a right electrodeis fixedly provided in the vicinity of the other of the booster circuits CPa and CPb of the two systems in the housing. A stray capacitance adjustment circuitadjusts capacitance values of stray capacitances of the booster circuits CPa and CPb of the two systems by electrically controlling an electrical connection characteristic between the left electrodeand the reference power supply voltageand an electrical connection characteristic between the right electrodeand the reference power supply voltage

Power supply module and charged particle beam device

A system and a method to optimize route plans for handling critical scenarios faced in an operating environment have been described. The system or a platform resolves one or more nodes based on the inputs related to an operating environment. The system plans one or more routes based on the resolved nodes to provide generated route plans. Based on the planning, the system may analyze one or more route plans for critical scenarios, for example, avoiding a collision or minimizing congestion, damage to the robot, performance of vehicle or warehouse, etc. After the route plans are analyzed, the system optimizes one or more route plans to provide optimized route plans. The optimized route plans are distributed to one or more autonomous vehicles. The fleet of autonomous vehicles may then route progress messages and share feedback with the platform.

Systems and methods for optimizing route plans in an operating environment

Deflection of a secondary beam, and astigmatism correction of a primary beam or of the secondary beam are carried out using a multi-pole electromagnetic deflector which deflects the path of the secondary beam toward a detector.

Charged particle beam device

When adjusting optical axes of a multi-beam charged particle beam device, because parameters of optical systems are inter-dependent, the time required to adjust the parameters increases. Thus, the present invention provides a charged particle beam device provided with an optical parameter setting unit for setting parameters of optical systems for emitting a plurality of primary charged particle beams to a sample, detectors for individually detecting a plurality of secondary charged particle beams discharged from the sample, a plurality of memories for storing signals detected by the detectors and converted into digital pixels in the form of images, evaluation value derivation units for deriving evaluation values of the primary charged particle beams from the images, and a GUI capable of displaying the images and receiving an input from a user, wherein the GUI displays the images and evaluation results based on the evaluation values and changes various optical parameters in real-time.

Charged particle beam device and operation method therefor

A charged particle beam device includes a detectorconverting a photon emitted by a scintillator into an electric signal and a signal processing unitprocessing the electric signal from the detector. The signal processing unitdetects a peak position of the electric signal, steepness of a rising section associated with the peak position, and steepness of a falling section associated with the peak position and classifies the peak position based on the steepness of the rising section and the steepness of the falling section.

Charged particle beam device, computer, and signal processing method for charged particle beam device

Provided is a charged particle beam device and a charged particle beam device calibration method capable of correcting an influence of characteristic variation and noise with high accuracy. Control units execute a first calibration of correcting a characteristic variation between a plurality of channels in detectors and signal processing circuits by using a setting value of a control parameter for each of the plurality of channels in a state in which a primary electron beam is not emitted. The control units further execute a second calibration of correcting a characteristic variation between the plurality of channels in scintillators or the like by using the setting value of the control parameter for each of the plurality of channels in a state in which the primary electron beam is emitted.

Charged particle beam device and charged particle beam device calibration method

A measurement device that comprises a photoelectric conversion element and a signal processing part that receives, from the photoelectric conversion element, detected pulses that include dark pulses and signal pulses that are outputted in accordance with inputted photons. The signal processing part performs amplitude discrimination on the detected pulses on the basis of a pre-acquired dark pulse amplitude distribution for the photoelectric conversion element.

Measurement device and signal processing method

The invention provides a power supply device and a charged particle beam device capable of reducing noise generated between a plurality of voltages. The charged particle beam device includes a charged particle gun configured to emit a charged particle beam, a stage on which a sample is to be placed, and a power supply circuit configured to generate a first voltage and a second voltage that determine energy of the charged particle beam and supply the first voltage to the charged particle gun. The power supply circuit includes a first booster circuit configured to generate the first voltage, a second booster circuit configured to generate the second voltage, and a switching control circuit configured to perform switching control of the first booster circuit and the second booster circuit using common switch signals.

Charged particle beam device and power supply device

To provide a technique capable of measuring high-frequency electrical noise in a charged particle beam device. A charged particle beam deviceincludes an electron sourcefor generating an electron beam EB, a stagefor mounting a sample, a detectorfor detecting secondary electrons EBemitted from the sample, and a control unitelectrically connected to the electron source, the stage, and the detectorand can control the electron source, the stage, and the detector. Here, when the sampleis mounted on the stage, and a specific portionof the sampleis continuously irradiated with the electron beam EBfrom the electron source, the control unitcan calculate a time-series change in irradiation position of the electron beam EBbased on an amount of the secondary electrons EBemitted from the specific portion, and can calculate a feature quantity for a shake of the electron beam EBbased on the time-series change in irradiation position. Further, the feature quantity includes a frequency spectrum.

Charged particle beam device and method of measuring electrical noise

Provided is a charged particle beam device capable of improving the accuracy of measurement and processing. The charged particle beam device includes an electrostatic chuck that adsorbs an inspection object, a voltage generation unit that generates a voltage to be supplied to the electrostatic chuck, and a state determination unit that determines a state of the inspection object. Here, the state determination unit includes a current waveform simulation unit that simulates a time-series change of an electrostatic chuck current flowing through the voltage generation unit when the electrostatic chuck normally adsorbs the inspection object, a difference integration unit that acquires an integration value of a difference between a time-series change of a simulation current generated by the current waveform simulation unit and the time-series change of the electrostatic chuck current flowing through the voltage generation unit, and a difference determination unit that determines an adsorption state of the inspection object and a shape feature of the inspection object based on the integration value of the difference.

A plurality of switching units are provided, and a controller performs control in an antiphase manner to approximately synchronize a rise of a control signal applied to one of the switching units with a fall of a control signal for switching applied to any one of the other switching units and synchronize a fall of the control signal applied to the one of the switching units with a rise of the control signal for switching applied to the any one of the other switching units. When control in an antiphase manner is disabled, control is performed to prevent rises or falls from coinciding with each other between the switching units. Output signals from the switching units are input to rectifiers and are combined by a combiner to become an output signal.

Power converter and control method of power converter that reduce ringing

Growing community of inventors

Tokyo, Japan

Wen Zheng Li