Taiwan Semiconductor Manufacturing Comp. Ltd.

Wen-Wen Hsieh

Hung-Chih Lin

Mill-Jer Wang

Hao Chen

Ching-Nen Peng

Ching-Fang Chen

Chung-Sheng Yuan

Meng-lin Chung

Chung-Han Huang

A three-dimensional integrated circuit testing apparatus comprises a probe card configured to couple a device-under-test of a three-dimensional integrated circuit with an automatic testing equipment board having a plurality of testing modules, wherein the probe card comprises a plurality of known good dies of the three-dimensional integrated circuit, a plurality of interconnects of the three-dimensional integrated circuit and a plurality of probe contacts, wherein the probe contacts are configured to couple the probe card with testing contacts of the device-under-test of the three-dimensional integrated circuit.

Apparatus for three dimensional integrated circuit testing

Growing community of inventors

Taipei, Taiwan

Wen-Wen Hsieh