Taiwan Semiconductor Manufacturing Comp. Ltd.

Wen-Shyang Tsai

Yu-Chih Huang

Wen-Lung Ho

Yin-Cheng Ma

Wen-Han Tan

Chen-Feng Lin

Sawyer Ho

Embodiments of mechanisms of forming a semiconductor device structure are provided. The semiconductor device structure is provided. The semiconductor device structure includes a substrate having a front side and a back side. The semiconductor device structure also includes devices formed on the front side of the substrate and interconnect structures formed on the devices. The semiconductor device structure further includes a protection layer formed on the back side of the substrate, and the protection layer has a thickness over about 10 A.

Mechanisms for forming protection layer on back side of wafer

A thermocoupled lift system for semiconductor etch chambers. The system comprises multiple thermocoupled lift pins which are vertically extendible from a heater block inside a semiconductor etch chamber and are capable of lowering a semiconductor wafer onto the heater block before the etching process and lifting the wafer from the heater block after the etching process. In the event that the temperature of the wafer exceeds a predetermined value after the etching process, the lift pins trigger release of a cooling purge gas such as nitrogen into the etching chamber to partially cool the wafer prior to transfer of the wafer to a cool down chamber for further cooling. The initial gas-induced cooling of the wafer prevents thermal stressing thereof upon transfer of the wafer to the cool down chamber.

Thermocoupled lift pin system for etching chamber

Growing community of inventors

Taipei, Taiwan

Wen-Shyang Tsai