Winbond Electronics Corporation

Industrial Technology Research Institute

Wen-Pin Chang

Ming-Lun Chang

Ray-Ten Chen

Jia-Ruey Wu

T C Wu

Chan-Ming Chen

Wen-Wha Lu

Chi-Maw Shieh

A method for forming a cross-linking photoresist layer is provided. The method includes steps of providing a photoresist layer; activating the photoresist layer with a light provided by a light source; and putting the photoresist layer in a vapor of a cross-linking agent to form the cross-linking photoresist layer.

Method for forming cross-linking photoresist and structures formed thereby

A method of planarizing a photoresist coating for a semiconductor device having a plurality of trenches including providing a first layer of photoresist over the plurality of trenches wherein the layer has a thickness and the photoresist is a positive-type photoresist, exposing the first layer to light having a predetermined energy, developing the exposed first layer wherein a portion of the first layer remains within the plurality of trenches, and providing a second layer of photoresist over the developed first layer.

Method for obtaining uniform photoresist coatings

The present invention provides a method for making the bottom electrode of a buried capacitor, which is characterized by protecting the non-bottom electrode region with a LPD oxide layer to prevent the impurities within the doped Si glass remaining in non-bottom electrode region from driving into the substrate during annealing, thus non-desired diffusing region connecting to the bottom electrode will be generated. Consequently, the leakage current existing in conventional buried capacitor will be effectively reduced according to the method of this present invention.

Method for making the bottom electrode of a capacitor

Disclosed is a method for forming a pattern by which the T-top formation problem of chemically amplified resists is eliminated. Preferably, an i-line resist is employed as a barrier layer to protect the underlying chemically amplified resist from base attack. The i-line resist used herein can be exposed and developed by a normal deep-UV lithography process without substantially affecting the performance of chemically amplified resists.

Method for forming pattern

A FAX-receiving-and-output device for secret information and method therefore, which comprises a first and a second information transmission channels for transmitting non-secret information and secret information respectively; the second information transmission channel includes a memory for storage of secret information, and a memory for storage of identifying code and memory address of a secret information. To transmit a secret information, the sender first inputs the identifying code of the intended recipient of that information before transmitting that secret information. An identifying module at an receiving terminal would recognize such identifying case, and the secret information will be stored in a memory. An identifying code of the intended recipient will be printed out allow the intended recipient to enter the password with a keyboard of a card scanner for configuration; if every identification is correct the secret information will be printed out so as to allow the information to be transmitted in a secured manner.

Facsimile apparatus and method for sending and receiving private

Disclosed is a method and device for automatic dynamic balancing operations on machine lines so as to compensate unbalance in a rotor. Vibration signals of the rotor obtained by a transducer and revolution signals generated by a revolution detector in reaction to the rotor during rotation are fed into a band pass filter and amplifier. The processed signals are then converted into digital signals by means of a digital dynamic balancing close-loop controller. The value and location of unbalance present in the rotor are calculated by a calculating unit. Based on the unbalance value and the speed of revolution of the rotor, whether a suitable amount of fluid is needed to be injected into compensation chambers in the rotor, which is coaxial with the rotor, to eliminate the unbalance of the rotor can be determined. This balancing operation is repeated automatically until the unbalance value is less than a predetermined tolerance value.

Growing community of inventors

Hsinchu, Taiwan

Wen-Pin Chang