Chinese Academy of Sciences

Wen Ou

Dapeng Chen

Chao Zhao

Wenwu Wang

Xueli Ma

A through-silicon via and a method for forming the same are provided. The method includes: providing a semiconductor substrate, the semiconductor substrate including an upper surface and an opposite lower surface; etching the upper surface of the semiconductor substrate to form an opening; filling the opening with a conductive material to form a first nail; etching the lower surface of the semiconductor substrate to form a recess, such that the first nail is exposed at a bottom of the recess; filling the recess with a conductive material that can be etched, and etching the conductive material that can be etched to form a second nail, such that the second nail is vertically connected with the first nail; and filling a gap between the second nail and the semiconductor substrate and a gap between the second nail and an adjacent second nail with a dielectric layer. Then invention can improve the reliability of through-silicon vias and avoid voids.

Through-silicon via and method for forming the same

The present invention provides a semiconductor device and a method for manufacturing the same. The method includes: providing a substrate; forming a gate stack on the substrate; forming an inter layer dielectric (ILD) to cover the device; etching the ILD at both sides of the gate stack and the substrate below the ILD, so as to form a groove of source and drain regions respectively; depositing a metal diffusion barrier layer in the groove; and filling the groove with a metal to form the source and drain regions. The semiconductor device includes: a substrate; a gate stack on the substrate; an inter layer dielectric (ILD) covering the device; a groove of source and drain regions formed in the ILD at both sides of the gate stack and the substrate below the ILD; and a metal diffusion barrier layer and a metal filler formed in the groove. According to the present invention, the S/D parasitic resistance in the MOS device is reduced, the S/D stress on the channel is increased, the process temperature is lowered, and the process compatibility between the high k gate dielectric layer and the metal gate is improved.

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Beijing, China

Wen Ou