United Microelectronics Corp.

Wen-Kuo Li

Chin-Lung Chen

Ming-Tsung Tung

Chin-Hung Liu

A laterally diffused metal-oxide-semiconductor (LDMOS) device as well as a method of making the same is disclosed. A gate is formed on a semiconductor substrate between a source region and a drain region with one side laterally extending onto a part of a field oxide layer and the opposite side beside the source region. A gate dielectric layer is formed between the gate and the semiconductor substrate, wherein the gate dielectric layer comprises two or more portions having different thicknesses arranged laterally in a way that the thicknesses of the portions gradually increase from one side beside the source doping region to the opposite side bordering the field oxide layer. With such structure, the hot carrier impact is minimized and the gate length can be scaled down to gain I.

Laterally diffused metal-oxide-semiconductor device and method of making the same

An IC chip, including a switch LDMOS device and an analog LDMOS device, is configured on a substrate having a first conductive type. Components of the two LDMOS devices respectively include two gate conductive layers configured on two first active regions of the substrate. A common source contact region having a second conductive type is configured in a second active region, which is configured between the two first active regions. An isolation structure is included for isolating the second active region and the first active regions. The isolation structure between the first active regions and the second active region has a length 'A' extending along a longitudinal direction of a channel under each gate conductive layer, and each gate conductive layer on each first active region has a length 'L' extending along the longitudinal direction of the channel, the two LDMOS devices have different A/L values.

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Taoyuan County, Taiwan

Wen-Kuo Li