Rexchip Electronics Corporation

Wen-Kuei Hsu

Yoshinori Tanaka

Wei-Che Chang

Kazuaki Takesako

Wei-Chih Liu

Chih-Wei Hsiung

Meng-Hsien Chen

Chun-Chiao Tseng

Yukihiro Nagai

Yu-Ling Huang

Chung-Yung Ai

Hirotake Fujita

Tomohiro Kadoya

Hsuan-Yu Fang

Yu-Shan Hsu

Chun-Hua Huang

A semiconductor device includes: a substrate having a base and an array of semiconductor pillars extending from the base, the substrate being formed with a plurality of trenches, each of which extends into the base and has two opposing trench side walls; a first insulative liner layer formed on each of the trench side walls of each of the trenches and divided into upper and lower segments by a gap that leaves a bit-forming surface of each of the trench side walls uncovered by the first insulative liner layer; and a plurality of buried bit lines, each of which extends into the base from the bit-forming surface of a respective one of the trench side walls of each of the trenches.

Semiconductor device and method for making the same

Growing community of inventors

Taichung, Taiwan

Wen-Kuei Hsu