Nikon Corporation

Wen-Hou Ma

Michael B Binnard

Bausan Yuan

Pai-Hsueh Yang

Ting-Chien Teng

Toshio Ueta

A stage assembly () that moves a work piece () about a first axis and along a first axis includes a first stage (), a second stage () that retains the work piece (), a second mover assembly (), a measurement system, and an initialization system (A). The second mover assembly () moves the second stage () relative to the first stage () about the first axis. The measurement system () monitors the position of the second stage () about the first axis when the second stage () is positioned within a working range about the first axis. The initialization system (A) facilitates movement of the second stage () about the first axis when the second stage () is rotated about the first axis outside the working range. The second mover assembly () can include a mover () and a dampener () that reduces the transmission of vibration from the first stage () to the second stage (). In addition, the stage assembly () can include a control system () that directs power to the mover () to position the second stage () and to compensate for vibration of the first stage ().

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Los Altos, CA, United States of America

Wen-Hou Ma