Taiwan Semiconductor Manufacturing Comp. Ltd.

Wen-Han Tan

Hung-Wen Chen

Yan-Hong Liu

Wen-Lung Ho

Po-Hsun Tseng

Wen-Shyang Tsai

A wafer container includes at least one shelf and a frame. The shelf is capable of holding at least one wafer, and has at least one opening therein. The opening is at least partially exposed by the wafer when the wafer is hold by the shelf. The frame carries the shelf and allows access to the shelf.

Wafer container and method for holding wafer

Embodiments of mechanisms of forming a semiconductor device structure are provided. The semiconductor device structure is provided. The semiconductor device structure includes a substrate having a front side and a back side. The semiconductor device structure also includes devices formed on the front side of the substrate and interconnect structures formed on the devices. The semiconductor device structure further includes a protection layer formed on the back side of the substrate, and the protection layer has a thickness over about 10 A.

Growing community of inventors

Hsinchu, Taiwan

Wen-Han Tan