Metal Industries Research & Development Centre

San Fang Chemical Industry Company, Ltd.

Bestac Advanced Material Co., Ltd.

Wen-Chieh Wu

Chung-Chih Feng

I-Peng Yao

Yung-Chang Hung

Lyang-Gung Wang

Chia-Ming Jan

Zhi-Wen Fan

Wei-Te Liu

Tzu-Hung Chen

Chun-Wei Chen

Haw-Ching Yang

Cheng-Yen Chen

Min-Nan Wu

Hsin-Ru Song

Chun Wei Chen

Yu Kai Chen

You Lun Chen

An online prediction method of tool-electrode consumption adapted for an electrical discharge machining (EDM) apparatus includes an experimental design; extracting electrode consumption variables from machining parameters of the electrical discharge machining (EDM) apparatus; and obtaining a correlation between the machining parameters and the electrode consumption variables through a correlation analysis to obtain a prediction model capable of predicting an effective contact area of a tool-electrode and a workpiece. In addition, a prediction method of machining accuracy is provided.

Online prediction method of tool-electrode consumption and prediction method of machining accuracy

The present invention is a probe forming device, the probe forming device comprises a spinning shaft, a first adjusting structure, a second adjusting structure, an electrolyte conveying member and a power supply. One of the holding member of the spinning shaft holds a workpiece, and a driving member drives the workpiece to move and abut the first adjusting structure and the second modulating structure. The electrolyte conveying member conveys an electrolyte to the workpiece, the first adjusting structure and the second adjusting structure, and is electrically connected. At least one positive end of the power supply is connected to the workpiece or the spinning shaft, and at least one negative end is connected to the first adjusting structure and the second modulating structure.

Probe forming device

An apparatus capable of local polishing and suitable for performing a plasma-electrolytic polishing process on an object is provided. The apparatus capable of local polishing includes a fixing seat, a motion mechanism, and a jet module connected to the motion mechanism and including an electrolyte communication port, a gas communication port, a power connection area, and a jet flow outlet. The jet flow outlet faces the fixing seat and is communicated with the electrolyte communication port and the gas communication port to be suitable for performing the plasma-electrolytic polishing process on the object fixed on the fixing seat. A plasma-electrolytic polishing system including an apparatus capable of local polishing is also provided.

Apparatus capable of local polishing and plasma-electrolytic polishing system

The present application discloses a method for processing probe. Firstly, a clamping member of a rotation shaft is clamped with a workpiece, and then the workpiece is moved to a processed area by the rotation shaft. The workpiece is rotated by the rotation shaft, and an electrochemical process of the workpiece is performed under the rotation of the shaft and an electrolyte sprayed between the workpiece and the polished module. During the performing of the electrochemical process, it can be that the rotation shaft is moved a processing distance or the included angle of the polish module is changed, for a probe being accomplished from the workpiece. Thereby, the abrasion of the polish module is lower and the performance for processing the probe under the electrochemical process.

Method for processing probe

The present invention relates to a polishing having a polishing layer, an elastic base layer and a binder layer. The binder layer binds the elastic base layer to the polishing layer. A compressibility of the elastic base layer is greater than a compressibility of the polishing layer. The present invention further provides a polishing apparatus and a method for polishing a substrate.

Polishing pad and polishing apparatus

A method for predicting precision of an electrical discharge machine is provided. In the method, plural sets of process data are obtained while the electrical discharge machine processes workpiece samples. Process features are established based on the process data. Each of the workpiece samples with respect to each of at least one measurement item is measured by using a metrology tool, thereby obtaining measurement values of the workpiece samples with respect to each measurement item. A correlation analysis operation is performed to obtain correlation coefficients. At least one key feature is selected from the process features as representative according to the correlation coefficients. The measurement values of the workpiece samples with respect to each measurement item, and the sets of process data corresponding to the key features are used to build a predictive model for predicting the precision of the electrical discharge machine.

Method for predicting precision of electrical discharge machine

A method for acquiring a dynamic vibration frequency includes the following steps. At least five pairs of vibration measurement elements are selected. A bandwidth range of the vibration measurement elements is determined. The vibration measurement elements in sequence on a first side and a second side, which are geometrically symmetrical to each other, of a main shaft are used to measure vibration displacements in a symmetrical position arranging manner. The vibration displacements measured by the vibration measurement elements of either of the first side and second side are corrected, so as to differentially eliminate an ambient noise. Positions of nodes located on the first side and the second side are calculated. The vibration displacements in the preceding steps are used to deduce dynamic vibration frequencies of main harmonics. A vibration mode of the main shaft is confirmed.

Method for acquiring dynamic vibration frequency

The sheet of a polishing equipment of the present invention includes a buffer layer, an adsorption layer, and an adhesion layer. The adhesion layer is disposed between the buffer layer and the adsorption layer. The adhesion layer has a plurality of adhesion points to bind the buffer layer and the adsorption layer together. The adhesion points are discontinuous and have gaps in between. Consequently, when the sheet is pressed, air can be vented out through the gaps between the adhesion points, so that the adsorption force is increased.

Polishing equipment having discontinuous adhesion points and method for making the sheet

The present invention relates to a polishing pad and a method for making the same. The polishing pad includes a polymeric elastomer and a plurality of hollow structures. The hollow structures are distributed in the polymeric elastomer uniformly, and the sizes of the hollow structures are substantially equal to each other.

Polishing pad and method for making the same

The present invention relates to a composite polishing pad and a method for making the same. The composite polishing pad includes a cushion layer and a polishing layer. The cushion layer includes a first polymeric elastomer with a hardness of 10 to 70 shore D, and is attached to the polishing layer directly. The polishing layer includes a second polymeric elastomer with a hardness of 30 to 90 shore D, and has a polishing surface for polishing a workpiece. Whereby, the polishing layer will not peel off from the cushion layer easily, so that the polishing quality is raised.

Composite polishing pad and method for making the same

The present invention relates to a polishing pad and a method for making the same. The polishing pad has a grinding layer. The grinding layer includes a plurality of fibers and a main body. The fineness of the fibers is 0.001 den to 6 den. The main body is a foam and encloses the fibers. The main body has a plurality of first pores and a plurality of second pores, wherein the first pores are communicated with each other, and the second pores are independent from each other. The size of the first pores is at least 5 times greater than the size of the second pores. The hardness of the grinding layer is 30 to 90 shore D, and the compression ratio thereof is 1% to 10%.

The present invention relates to a sheet for mounting a workpiece, which includes a sheet body. The sheet body includes a top surface, a plurality of foamed pores, and a plurality of surface holes or at least one surface groove. The top surface is used for mounting a workpiece. The foamed pores are disposed in the interior of the sheet body. The surface holes or the surface groove have opening on the top surface but does not communicate with the foamed pores. The surface holes or the surface groove is formed by machining, and arranged in at least one pattern. Whereby, the time for taking off the workpiece from the sheet is reduced.

Sheet for mounting a workpiece

The present invention relates to a polishing pad that comprises a polishing sheet for polishing a substrate, a buffer sheet comprising a plurality of holes, and adhesive for adhering the buffer sheet to the polishing sheet; wherein the adhesive is formed by polymerizing macromolecules with fluidity. A method of polishing a substrate comprising using the polishing pad and a method for manufacturing the polishing pad described above are also provided.

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Kaohsiung, Taiwan

Wen-Chieh Wu