Delta Electronics, Inc.

Delta Electroncs, Inc.

Wen-Chia Liao

Li-Fan Lin

Ching-Chuan Shiue

Shih-Peng Chen

Chun-Chieh Yang

Ying-Chen Liu

Chen-Ting Chiang

A semiconductor device includes a substrate, an active layer, a source electrode, a drain electrode, a p-type doped layer, a gate electrode, a passivation layer, and a field plate. The active layer is disposed on the substrate. The source electrode, the drain electrode and the p-type doped layer are disposed on the active layer. The p-type doped layer is disposed between the source electrode and the drain electrode, and has a first thickness. The gate electrode is disposed on the p-type doped layer. The passivation layer covers the gate electrode and the active layer. The field plate is disposed on the passivation layer and is electrically connected to the source electrode. The field plate includes a field dispersion portion disposed between the gate electrode and the drain electrode. The passivation layer between the field dispersion portion and the active layer has a second thickness smaller than the first thickness.

Semiconductor device manufacturing method

A semiconductor structure is provided, which includes a semiconductor device, a first conductive layer, and a gate runner. The semiconductor device includes an upper surface, a gate terminal, a source terminal, and a drain terminal. The first conductive layer is deposited on the upper surface and coupled to the source terminal. The gate runner is overlapped with the first conductive layer and coupled to the gate terminal. The gate runner and the first conductive layer are configured to contribute a parasitic capacitance between the gate terminal and the source terminal.

Enclosed gate runner for eliminating miller turn-on

A semiconductor device includes an active layer, a source electrode, a drain electrode, a gate electrode, a source pad, a drain pad, and a source external connecting element. The source electrode, the drain electrode, and the gate electrode are disposed on an active region of the active layer. The source pad is electrically connected to the source electrode and includes a body portion, a plurality of branch portions, and a current diffusion portion. The body portion is at least partially disposed on the active region of the active layer. The current diffusion portion interconnects the body portion and the branch portions. A width of the current diffusion portion is greater than a width of the branch portion and less than a half of a width of the body portion. The source external connecting element is disposed on the body portion and spaced from the current diffusion portion.

Heterojunction semiconductor device having source and drain pads with improved current crowding

A semiconductor device including an active layer made of III-V group semiconductors, a source electrode and a drain electrode disposed on the active layer, a gate electrode disposed on or above the active layer and between the source electrode and the drain electrode, an interlayer dielectric covering the source electrode, the drain electrode, and the gate electrode and having a plurality of inter-gate via holes. The semiconductor device further includes an inter-source layer, an inter-drain layer, and an inter-gate layer disposed on the interlayer dielectric. The semiconductor device further includes an inter-gate plug filled in the inter-gate via hole and electrically connected to the gate electrode and the inter-gate layer, and a gate field plate being separated from the gate electrode and electrically connected to the gate electrode through the inter-gate layer.

Heterojunction semiconductor device for reducing parasitic capacitance

Semiconductor device and manufacturing method thereof

A semiconductor device includes an active layer, a source electrode, a drain electrode, a gate electrode, an interlayer dielectric, an inter-source layer, an inter-source plug, an inter-drain layer, an inter-drain plug, an inter-gate layer, and an inter-gate plug. The active layer is made of III-V group semiconductors. The source electrode, the drain electrode, and the gate electrode are disposed on the active layer. The gate electrode is disposed between the source electrode and the drain electrode. The interlayer dielectric covers the source electrode, the drain electrode, and the gate electrode. The inter-source layer, the inter-drain layer, and the inter-gate layer are disposed on the interlayer dielectric. The inter-source plug is electrically connected to the source electrode and the inter-source layer. The inter-drain plug is electrically connected to the drain electrode and the inter-drain layer. The inter-gate plug is electrically connected to the gate electrode and the inter-gate layer.

A semiconductor device includes a substrate, an active layer, a source electrode, a drain electrode, a gate electrode, a first metal layer, and a second metal layer. The active layer is disposed on the substrate. The source electrode and the drain electrode are electrically connected to the active layer. The gate electrode is disposed on the active layer and between the source electrode and the drain electrode. The gate electrode has a first extending portion extending toward the drain electrode. The first metal layer is partially disposed between the first extending portion and the active layer, and extends toward the drain electrode. The second metal layer is disposed above the first extending portion and extends toward the drain electrode. Another portions of the first and second metal layers protrude from the first extending portion. The first metal layer and the second metal layer are electrically connected to the source electrode.

Low miller factor semiconductor device

A semiconductor device includes a substrate, a channel layer, a spacer layer, a barrier layer, and an oxidized cap layer. The channel layer is disposed on or above the substrate. The spacer layer is disposed on the channel layer. The barrier layer is disposed on the spacer layer. The oxidized cap layer is disposed on the barrier layer. The oxidized cap layer is made of oxynitride.

Transistor with oxidized cap layer

Method of manufacturing a transistor with oxidized cap layer

A semiconductor device includes a substrate, an active layer, a transistor, and a capacitor. The active layer is disposed on the substrate, and the active layer is divided into a first portion and a second portion. The transistor and the capacitor are disposed on the substrate. The transistor includes the second portion, a source electrode, a drain electrode, and a gate electrode. The source electrode and the drain electrode are respectively and electrically connected to the second portion. The gate electrode is disposed on the second portion. The capacitor includes the first portion, a first electrode, a first insulating layer, and a second electrode. The first electrode is electrically connected to the first portion and the source electrode. The first insulating layer is disposed on the first portion. The second electrode is disposed on the first insulating layer and is electrically connected to the gate electrode.

Semiconductor device

A semiconductor device includes a substrate, an active layer, a source electrode, a drain electrode, a gate electrode, a field plate, a first passivation layer, and a metal layer. The active layer is disposed on the substrate. The source electrode and the drain electrode are respectively electrically connected to the active layer. The gate electrode is disposed between the source electrode and the drain electrode and above the active layer. The field plate is disposed above the active layer and between the gate electrode and the drain electrode. The first passivation layer covers the gate electrode and the field plate. The metal layer is disposed on the first passivation layer, is disposed above the gate electrode and the field plate, and is electrically connected to the source electrode.

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Taoyuan, Taiwan

Wen-Chia Liao