Taiwan Semiconductor Manufacturing Comp. Ltd.

TSMC Solar Ltd.

Wen-Cheng Kuo

Chun-Wen Cheng

Chia-Hua Chu

Tzu-Heng Wu

Chun-Yin Tsai

Kwang-Ming Lin

Chi-Wei Liu

An integrated microphone device is provided. The integrated microphone device includes a substrate, a plate, and a membrane. The substrate includes an aperture allowing acoustic pressure to pass through. The plate is disposed on a side of the substrate. The membrane is disposed between the substrate and the plate and movable relative to the plate as acoustic pressure strikes the membrane. The membrane includes a vent valve having an open area that is variable in response to a change in acoustic pressure.

Integrated microphone device and manufacturing method thereof

A method for forming thin film solar cell materials introducing a first inert gas mixture that includes hydrogen selenide into a chamber at a first pressure value until the chamber reaches a second pressure value and at a first temperature value, wherein the second pressure value is a predefined percentage of the first pressure value. The temperature in the chamber is increased to a second temperature value for a selenization process so that the pressure in the chamber increases to a third pressure value. Residual gas that is generated during the selenization process can be removed from the chamber. A second inert gas mixture that includes hydrogen sulfide is added into the chamber until the chamber reaches a fourth pressure value. The temperature in the chamber is increased to a third temperature value for a sulfurization process. The chamber is cooled after the sulfurization process.

Apparatus and methods for forming thin film solar cell materials

Growing community of inventors

Changhua County, Taiwan

Wen-Cheng Kuo