Taiwan Semiconductor Manufacturing Comp. Ltd.

Wen-Chen Chang

Chao-Hsin Chang

Jiunn-Der Yang

Renn-Shyan Yeh

A method and system provide for yield loss analysis for use in determining the killer stage in the manufacture of a semiconductor wafer at a plurality of manufacturing stages. The method comprising the following steps. Inspect semiconductor devices on the wafer visually to identify the location of visual defects on dies being manufactured on the wafer and to maintain a count of visual defects on the dies by location. Inspect the semiconductor dies on the wafer to determine the location and number defective dies on the wafer at each of the manufacturing stages. Calculate the defective die count for each stage for the wafer. Calculate the defective bad die count for each stage for the wafer. Determine the percentage of the defective bad die count divided by the defective die count. Plot the trend of the percentage of yield loss and the percentage of defective bad dies for each of the manufacturing stages. Compare the plots to determine the killer stage from analysis of the relative trends of matching between the plots of yield lost and the percentage of bad dies for the stage.

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Hsin-Chu, Taiwan

Wen-Chen Chang