3M Innovative Properties Company

Advanced Micro-Fabrication Equipment Inc. China

Weina Wang

Jie Liang

Leyi Tu

Heng Liu

Shupeng Wu

Xiaohai Sheng

Lu Shen

Yu Che

Xiangming Yang

Panpan Lin

Longbao Chen

Yunshu Zhang

The present invention provides a pressure-sensitive adhesive composition, including: an acrylic copolymer and a crosslinking agent. The acrylic copolymer is a reaction product of a mixture of the following monomers: a first alkyl (meth)acrylate, an alkyl group in the first alkyl (meth)acrylate having at least 6 carbon atoms; a second alkyl (meth)acrylate, an alkyl group in the second alkyl (meth)acrylate having 1 to 5 carbon atoms; and a vinyl carboxylic acid, the weight ratio of the vinyl carboxylic acid to the mixture being 4% to 5%. The crosslinking agent is an organometallic chelating agent. The weight ratio of the organometallic chelating agent to the mixture is 0.05% to 0.25%. The pressure-sensitive adhesive composition does not contain an effective amount of a tackifier. The present invention further provides a pressure-sensitive adhesive solution, a pressure-sensitive adhesive tape, and a method for preparing the same. The pressure-sensitive adhesive of the present invention is a removable pressure-sensitive adhesive, and is applicable in hot weather and cold weather, and the adhesiveness of the pressure-sensitive adhesive does not decrease over time.

Pressure-sensitive adhesive composition and pressure-sensitive adhesive tape

Disclosed are a radio frequency electrode assembly for a plasma processing apparatus, and a plasma processing apparatus, wherein the radio frequency electrode assembly for a plasma processing apparatus comprises: a base in which a first fluid passage is provided, the first fluid passage being configured for connecting to a first fluid source; an electrostatic chuck disposed on the base; a focus ring disposed peripheral to the electrostatic chuck; a heat conducting ring disposed around the base, the heat conducting ring enclosing at least part of the base, the heat conducting ring being disposed below the focus ring, a second fluid passage being provided in the heat conducting ring, the second fluid passage being connected to a second fluid source, heat conduction being enabled between the heat conducting ring and the focus ring. The plasma processing apparatus can adjust polymers distribution in the edge area of the to-be-processed substrate.

Radio frequency electrode assembly for plasma processing apparatus, and plasma processing apparatus

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Shanghai, China

Weina Wang