Semiconductor Manufacturing International (shanghai) Corporation

Ce Pharm Co., Ltd.

Weiming He

Dawei Ma

Huayong Hu

Zhigao Zhang

Lihua Ding

The present invention provides a preparation method for a natural product Trabectedin. Specifically, the present invention provides a preparation method for Et-743. In the method, tyrosine is used as an initial substrate, and after 26 steps of reaction, the Et-743 is synthesized. Raw materials and agents used in the synthetic route can all easily be obtained, reaction conditions are relatively mild, and preparation in large scale can be implemented.

Preparation for natural product trabectedin

A method for fabricating a semiconductor structure is provided. The method includes providing a semiconductor substrate; and forming a plurality of semiconductor devices on the semiconductor substrate. The method also includes forming a dielectric layer covering the plurality of the semiconductor devices on the semiconductor substrate; and forming an optical auxiliary layer configured to reflect a portion of a levelness-detecting light and absorb a portion of the levelness detecting light transmitting through the optical auxiliary layer during a levelness-detecting process over the dielectric layer. Further, the method includes forming a photoresist layer over the optical auxiliary layer; and detecting a levelness of the semiconductor substrate and exposing the photoresist layer to form a patterned photoresist layer.

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Shanghai, China

Weiming He