Applied Materials, Inc.

Realtek Semiconductor Inc.

Mattson Technology, Inc

Beijing E-town Semiconductor Technology, Co., Ltd

Micronas Usa, Inc.

Wis Technologies, Inc.

Weimin Zeng

Yong Cao

Chi-Wang Chai

Wujun Chen

Daniel Lee Diehl

Wei Li

Wei Pu

Maolin Long

Huixiong Dai

Jing Wang

Li Sha

Thanh X Nguyen

Christopher Dennis Bencher

Xianmin Tang

Rongjun Wang

Tingjun Xu

Peng Xie

Rong Zhang

Qingxi He

Ellie Y Yieh

Nag B Patibandla

Thorsten B Lill

Khoi A Phan

Todd J Egan

Li Liu

Mingwei Zhu

Meihua Shen

Lingzhi Liu

Christopher S Ngai

Hsu-Jung Tung

Edward W Budiarto

Uday Mitra

Shuhua Xiang

Zihao Yang

Yana Cheng

Srinivas Guggilla

Nicolas Gani

Yaojun Luo

Yu Guan

Noel Sun

Yi-Chen Tseng

Ping Zhu

Niranjan Ramchandra Khasgiwale

Teng Chiang Lin

He Ouyang

Han-Hsiang Chen

Eric Pei

Jun Ding

Jeng-Shiou Lai

Renjing Zheng

Surender Kumar Gurusamy

A plasma processing apparatus including a processing chamber having one or more sidewalls and a dome is provided. The plasma processing apparatus includes a workpiece support disposed in the processing chamber configured to support a workpiece during processing, an induction coil assembly for producing a plasma in the processing chamber, a Faraday shield disposed between the induction coil assembly and the dome, the Faraday shield comprising an inner portion and an outer portion, and a thermal management system. The thermal management system including one or more heating elements configured to heat the dome, and one or more thermal pads disposed between an outer surface of the dome and the heating elements, wherein the one or more thermal pads are configured to facilitate heat transfer between the one or more heating elements and the dome. Thermal management systems and methods for processing workpieces are also provided.

Plasma processing apparatus

A gas injection assembly for injecting gas into a processing chamber is provided. In some examples, the gas injection assembly can include an inlet for receiving a gas flow. The gas injection assembly can include a plurality of gas feed ports for distributing the gas flow received from the inlet. The gas injection assembly can include a plurality of subchannels vertically arranged inside of the gas injection assembly, including: an upper subchannel for receiving the gas flow from the inlet and subdividing the gas flow into a set of orifices to form a first gas flow branch and a second gas flow branch, the first gas flow branch corresponding to a first portion of the gas flow passing through a first subset of the set of orifices and the second gas flow branch corresponding to a second portion of the gas flow passing through a second subset of the set of orifices; and a plurality of outlet subchannels for subdividing the gas flow into the plurality of gas feed ports.

Workpiece processing apparatus with outer gas channel insert

A method for compressing images based on joint photographic experts group (JPEG) standard includes: compressing data of one or more first image blocks with a first compression level to produce compression data of the one or more first image blocks; adjusting the first compression level to obtain a second compression level according to at least one of a data size-related index regarding the compression data of the one or more first image blocks or a transmission-related index regarding transmission of the compression data of the one or more first image blocks; and compressing data of a second image block with the second compression level.

Method and apparatus of image compression with bit rate control

The present invention provides an encoder including a quantization circuit, a control circuit and an encoding circuit is disclosed. The quantization circuit is configured to generate quantized data corresponding to a CTU according to image data, wherein the CTU comprises at least one TU. The control circuit is configured to determine a number of allocated bits for each TU in the CTU, where the number of allocated bits for each TU is determined based on a sum of remaining bits of the TUs that have been encoded. The encoding circuit is configured to encode each TU to obtain encoded data according to the number of allocated bits of the TU in the CTU.

Encoder and associated signal processing method

An electrostatic chuck including a clamping layer having a first clamping electrode and a second clamping electrode is disclosed. A first clamping electrode defining a first clamping zone and a second clamping zone is provided. The first clamping zone and the second clamping zone are separated by a first gap and are electrically connected by at least one electrical connection extending across the first gap. A second clamping electrode disposed radially outward from the first clamping electrode. The second clamping electrode defining a third clamping zone and a fourth clamping zone that are separated by a second gap. The third clamping zone and the fourth clamping zone are electrically connected by at least one electrical connection extending across the second gap. Plasma processing apparatuses and systems incorporating the electrostatic chuck are also provided.

Electrostatic chuck assembly for plasma processing apparatus

The present invention provides an encoder including a quantization circuit, an encoding circuit, an energy parameter calculation circuit and a quantization parameter determination circuit. The quantization circuit is configured to perform quantization operations on a plurality of CTUs in image data in sequence to generate quantized data respectively corresponding to the plurality of CTUs. The encoding circuit is configured to perform encoding operations on the quantized data of the plurality of CTUs in sequence to generate encoded data. The energy parameter calculation circuit is configured to receive the image data, and calculate a plurality of energy parameters respectively corresponding to the plurality of CTUs in the image data. The quantization parameter determination circuit is configured to determine a plurality of quantization parameters of the plurality of CTUs according to at least a portion of the plurality of energy parameters, for the quantization circuit to perform the quantization operations.

A loop filter utilized in an encoder includes a constrained directional enhancement filter and a decision circuit. The constrained directional enhancement filter is arranged to process multiple frames, wherein for a first frame in the multiple frames, the constrained directional enhancement filter determines a best filter strength of each block in the first frame in a first filter strength list, and determines a second filter strength list according to content of the first frame. The decision circuit is coupled to the constrained directional enhancement filter, and is arranged to record which index in the first filter strength list is the best filter strength corresponding to each block in the first frame, and provide the first filter strength list and the index corresponding to each block to an encoding circuit of the encoder as an output of the encoder.

Loop filter utilized in encoder and associated signal processing method

A prediction circuit in an encoder utilizes a specific partition mode to process a super block for generating a plurality of reconstructed pixel values for each block in the super block, and the reconstructed pixel values of each block are directly utilized as reference pixels for other blocks to perform intra-frame prediction, so as to improve the efficiency of the encoder.

An encoder includes a frame level processing circuit, a coding tree unit (CTU) level processing circuit and an encoding circuit. The frame level processing circuit is arranged to calculate a bit number of a current frame according a target bitrate and a frame rate, and the frame level processing circuit is further arranged to calculate a quantization parameter of the current frame according to the bit number of the current frame and at least one parameter. The CTU level processing circuit is arranged to use an adaptive quantization mode to adjust the quantization parameter to generate an adjusted quantization parameter. The encoding circuit is arranged to encode the current frame to generate output data according to the adjusted quantization parameter.

Encoder using coding tree unit level adaptive quantization mode to adjust frame level quantization parameter and associated signal processing method

The present application provides a method for storing an image frame in a memory, including: receiving the image frame; dividing the image frame into M rows of data block rows along a first direction; dividing each of the M rows of data block rows into N data blocks along a second direction perpendicular to the first direction; performing a compression operation upon each of the M*N data blocks individually to generate M*N compressed data blocks; and storing N compressed data blocks corresponding to the 1st data block row of the M data block rows and N compressed data blocks corresponding to the (P+1)data block row of the M data block rows in a continuous storage space in the memory, wherein M, N, and P are integers, and M&#x3e;1, N&#x3e;0 and P&#x3c;M.

Image processor having a compressing engine performing operations on each row of M*N data block

In some embodiments, a method of processing a substrate disposed atop a substrate support in a physical vapor deposition process chamber includes: (a) forming a plasma from a process gas within a processing region of the physical vapor deposition chamber, wherein the process gas comprises an inert gas and a hydrogen-containing gas to sputter silicon from a surface of a target within the processing region of the physical vapor deposition chamber; and (b) depositing an amorphous silicon layer atop a first layer on the substrate, wherein adjusting the flow rate of the hydrogen containing gas tunes the optical properties of the deposited amorphous silicon layer.

Methods for depositing amorphous silicon layers or silicon oxycarbide layers via physical vapor deposition

A selection module for selecting an intra mode comprises a histogram of oriented gradient (HOG) module, for receiving a coding unit (CU), to select four angular modes from 33 angular modes of the CU, a DC mode of the CU and a planar mode of the CU; and a decision module, couple to the HOG module, for receiving the six modes from the HOG module, to compare the six modes according to a Split Sum of Absolute Transformed Difference (SSATD) algorithm, to select one of the six modes.

Device and method of selecting an intra mode of a coding unit

The present disclosure generally relates to tin oxide films prepared by physical vapor deposition using a doped tin target. The semiconductor film may include tin and oxygen, and may be formed in a PVD chamber including a silicon doped tin target. Additionally, the semiconductor film may be smooth compared to similarly formed films without a doped target. The semiconductor film may be deposited by applying an electrical bias to a sputtering silicon doped tin target including the silicon in an amount of 0.5 to 5% by atomic weight of the total target. The semiconductor film has a smooth surface morphology compared to similarly formed tin oxide films formed without a doped target.

Methods of making and using tin oxide film with smooth surface morphologies from sputtering target including tin and dopant

A transmitter for handling multiple formats of a video sequence, comprises a preprocessing module, for receiving a first format of a video sequence, to generate metadata of a second format of the video sequence according to the first format of the video sequence and the second format of the video sequence; and an encoder, couple to the preprocessing module, for transmitting the first format of the video sequence and the metadata in a bit stream to a receiver.

Device and method of handling multiple formats of a video sequence

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San Jose, CA, United States of America

Weimin Zeng