Western Digital (fremont), Inc.

Weimin Si

Ying Hong

Lieping Zhong

Wanxue Zeng

Zhigang Bai

Tao Pan

Ching-Huang Lu

Feng Q Liu

Yun-Fei Li

Yan Chen

Lien-Chang Wang

Donghong Li

Fenglin Liu

Jinwen Wang

Jianxin Fang

Hongzhou Jiang

Ming Jiang

Lijie Guan

Liubo Hong

Yugang Wang

Hong Zhang

Dujiang Wan

Guanghong Luo

Honglin Zhu

Danning Yang

Yunfei Li

Samuel Weisan Yuan

Xiaoyu Yang

Winnie Yu

Jikou Zhou

Yunhe Huang

Ling Wang

Yuan Yao

Rowena Schmidt

Iulica Zana

Various embodiments described herein provide for substrate structures including uniform plating seed layers, and that provide favorable adhesion on dielectric substrate layers. According to some embodiments, a methods for forming a magnetic recording pole is provided comprising: forming an insulator layer; forming a trench in the insulator layer; forming an amorphous seed layer over the insulator layer; forming an adhesion layer over the amorphous seed layer, the adhesion layer comprising a physical vapor deposited (PVD) noble metal; forming a plating seed layer over the adhesion layer, the plating seed layer comprising chemical vapor deposited (CVD) Ru; and forming a magnetic material layer over the plating seed layer.

Methods for improving adhesion on dielectric substrates

A method of forming a wrapped-around shielded perpendicular magnetic recording writer pole is disclosed. A structure comprising a leading shield layer and an intermediate layer disposed over the leading shield layer is provided, the intermediate layer comprising a pole material and a dielectric material. A trench is formed in the dielectric material. A non-magnetic layer in the trench is removed via an ion beam etching process. A seed layer is deposited in the trench and over the pole material. A magnetic material comprising a side shield layer is deposited on at least a portion of the seed layer.

Method of forming a fully wrapped-around shielded PMR writer pole

A magnetic transducer has an ABS, a pole, coil(s) and a trailing shield. The pole includes a trailing surface having first and second portions. The first portion adjoins the ABS and is oriented at a first bevel angle from perpendicular to the ABS. The first bevel angle is nonzero and acute. The second portion adjoins the first portion, is recessed from the ABS and oriented at a second bevel angle from perpendicular to the ABS. The second bevel angle is less than the first bevel angle and nonzero. The trailing shield has a pole-facing surface part of which adjoins the ABS and is oriented at the first bevel angle. A write gap is between the trailing shield and the pole. The write gap has a constant thickness for the first portion of the trailing surface and a thickness that increases with increasing distance from the ABS for the second portion.

Magnetic recording write transducer having an improved trailing surface profile

A method and system for fabricating magnetic transducer are described. The method and system include providing a main pole having a bottom and a top wider than the bottom. The method and system further include performing a high energy ion mill at an angle from a normal to the top of the main pole and at a first energy. The high energy ion mill removes a portion of the top of the main pole and exposes a top bevel surface for the main pole. The method and system also include performing a low energy ion mill at second energy and a glancing angle from the top bevel surface. The glancing angle is not more than fifteen degrees. The second energy is less than the first energy. The method and system also include depositing a nonmagnetic gap.

Method and system for providing a perpendicular magnetic recording transducer using a low energy mill

Systems and methods for fabricating a microelectric device are provided herein. Various embodiments provide for systems and methods for fabricating a magnetic recording pole using plasma-enhanced chemical vapor deposition (PECVD) when depositing seed material. For some embodiments, fabrication of the magnetic recording pole may comprise using plasma-enhanced chemical vapor deposition (PECVD) Ru as an adhesion layer for a plating seed layer.

System and method for deposition in high aspect ratio magnetic writer heads

A writer main pole for a perpendicular magnetic recording system is provided. The writer pole has a tunable bottom gap to side gap ratio, and may be formed using deposition of a first seed layer through an ion beam deposition process, deposition of a second seed layer through a physical vapor deposition process, and deposition of a non-magnetic gap layer through a chemical vapor deposition process.

Methods for tunable plating seed step coverage

A method for fabricating a magnetic recording transducer having a magnetic writer pole with a short effective throat height is provided. In an embodiment, a writer structure comprising a magnetic writer pole having a trailing bevel and a nonmagnetic stack on the top surface of the writer pole is provided. A dielectric write gap layer comprising alumina is deposited over the trailing bevel section and the nonmagnetic stack; and at least one etch stop layer is deposited over the dielectric write gap layer. A layer of nonmagnetic fill material is deposited over the etch stop layer and to form a nonmagnetic bevel by performing a dry etch process. The etch stop layer(s) are removed from the short throat section; and a trailing shield is deposited over the short throat section, nonmagnetic bevel, and nonmagnetic stack top surface.

Process for manufacturing a perpendicular magnetic recording writer pole with nonmagnetic bevel

A method or forming a wrapped-around shielded perpendicular magnetic recording writer pole is disclosed. A structure comprising a leading shield layer and an intermediate layer disposed over the leading shield layer is provided, the intermediate layer comprising a pole material and a dielectric material. A trench is formed in the dielectric material. A non-magnetic layer in the trench is removed via an ion beam etching process. A seed layer is deposited in the trench and over the pole material. A magnetic material comprising a side shield layer is deposited on at least a portion of the seed layer.

A method for fabricating magnetic transducer is described. The method includes providing a main pole having a bottom and a top wider than the bottom. The method further includes performing a high energy ion mill at an angle from a normal to the to of the main pole and at a first energy. The high energy ion mill removes a portion of the top of the main pole and exposes a top bevel surface for the main pole. The method also includes performing a low energy ion mill at second energy and a glancing angle from the top bevel surface. The glancing angle is not more than fifteen degrees. The second energy is less than the first energy. The method and system also include depositing a nonmagnetic gap.

Method for providing a perpendicular magnetic recording transducer using a low energy mill

A method provides a pole of magnetic recording transducer. A nonmagnetic stop layer having a thickness and a top surface is provided. A depression that forms a bevel is provided in the stop layer. The bevel has a depth less than the thickness and a bevel angle with respect to a remaining portion of the top surface. The bevel angle is greater than zero and less than ninety degrees. An intermediate layer having a substantially flat top surface is provided over the stop layer. A trench is formed in the intermediate layer via a removal process. The trench has a profile corresponding to the pole. The stop layer is a stop for the removal process. The method also includes providing the pole in the trench. The pole has a leading edge bevel corresponding to the bevel in the stop layer.

Method for fabricating a pole of a magnetic transducer

A method and system provide a magnetoresistive structure from a magnetoresistive stack that includes a plurality of layers. The method and system include providing a mask that exposes a portion of the magnetoresistive stack. The mask has at least one side, a top, and a base at least as wide as the top. The method and system also include removing the portion of the magnetoresistive stack to define the magnetoresistive structure. The method and system further include providing an insulating layer. A portion of the insulating layer resides on the at least one side of the mask. The method and system further include removing the portion of the insulating layer on the at least one side of the mask and removing the mask.

Method and system for providing a magnetoresistive structure using undercut free mask

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San Ramon, CA, United States of America

Weimin Si