Fuji Jukogyo Kabushiki Kaisha

Riken Corporation

Weimin Lin

Hitoshi Ohmori

Shinya Morita

Yutaka Watanabe

Yasutaka Yamamoto

Jiro Maruyama

Yoshihiro Uehara

Kazutoshi Katahira

Yasutaka c/o Fuji Jukogyo Kabushiki Kaisha Yamamoto

Jiro c/o Fuji Jukogyo Kabushiki Kaisha Maruyama

An ELID honing device includes a honing toolpositioned above a workpiecehaving a hollow cylindrical inner surface, and vertically movable and rotationally drivable about a vertical rotation axis while being rockably suspended from an upper end, and a honing guidepositioned in proximity to an upper portion of the workpiece to guide the honing tool to the hollow cylindrical inner surface. The honing toolhas a fixed guidehaving a predetermined radius R from the rotation axis to its outer peripheral surface, and honing stonesandhaving outer peripheral surfaces movable in parallel from a diameter-increased position outside the radius R to a diameter-reduced position inside the radius R and capable of being electrolytically dressed. Further, the honing guidehas a hollow cylindrical ELID electrodehaving an inner surfacefor guiding an outer peripheral surface of the fixed guide of the honing tool and capable of being subjected to a negative voltage.

Device and method for ELID honing

There is disclosed a micro surface shape measurement probe including a probe shafthaving at a distant end thereof a probe memberfor contacting an objectto be measured, a probe bodyprovided with support means for movably supporting the probe shaftin a non-contact manner, a pressing device for pressing and moving the probe shafttoward the objectto be measured, a piezoelectric sensorincorporated in the probe bodyso that a reactive force acts to a pressing force applied to the probe shaft by the pressing device, a load detecting deviceto measure a load acting on the piezoelectric sensor, a control devicefor adjusting the pressing force applied by the pressing device based on the load detected by the load detecting device, and a displacement amount measuring device for measuring a position of the probe memberin contact with the objectto be measured by the pressing force adjusted by the control device

Micro force measurement device, micro force measurement method, and micro surface shape measurement probe

Growing community of inventors

Saitama, Japan

Weimin Lin