Bruker Nano Gmbh

Weijie Wang

Chanmin Su

Shuiqing Hu

Stephen C Minne

Yan Hu

Ji Ma

Lin Huang

Henry Mittel

Martin Wagner

Jianli He

Chunzeng Li

Jeffrey Wong

Steven Nagle

Deepkishore Mukhopadhyay

Joseph S Fragala

Xing Zhao

Izhar Medalsy

Rakesh Poddar

A method of batch-fabricating an array of probe devices for a surface analysis instrument, such as an atomic force microscope (AFM), includes providing a wafer, and photolithographically forming a base and a cantilever for each probe. The cantilever includes a built-in angle, &#x3b8;, relative to the base, and the base is substantially parallel to a sample holder when the probe device is mounted in a probe holder of the surface analysis instrument.

Metrology probe with built-in angle and method of fabrication thereof

A torsional probe for a metrology instrument includes a cantilever coupled to a support structure via a torsion bar. The cantilever, support structure, and arms of torsion bar have substantially the same thickness. A method of manufacture of the torsion probe, as well as a method of using the torsion probe to measure photothermal induced surface displacement of a sample are also described.

Torsion wing probe assembly

A torsional probe for a metrology instrument includes a cantilever coupled to a support structure via a torsion bar. The cantilever, support structure, and arms of torsion bar have substantially the same thickness.

According to embodiments, a cantilever probe for use with an atomic force microscope (AFM) or scanning probe microscope (SPM) has a pad of conformable material that facilitates non-permanent adhesion through van der Waals interactions. Such removable probes and probe tips facilitate use of multiple tips or probes, while reducing the need for recalibration or repositioning.

Scanning probe microscopy utilizing separable components

An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.

Method and apparatus of electrical property measurement using an AFM operating in peak force tapping mode

Cantilever probes are formed from a multilayer structure comprising an upper substrate, a lower substrate, an interior layer, a first separation layer, and a second separation layer, wherein the first separation layer is situated between the upper substrate and the interior layer, the second separation layer is situated between the lower substrate and the interior layer, and wherein the first and the second separation layers are differentially etchable with respect to the first and the second substrates, the interior layer. The upper substrate is a first device layer from which a probe tip is formed. The interior layer is a second device layer from which a cantilever arm is formed. The lower substrate is a handle layer from which a handle, or base portion, is formed. Patterning and etching processing of any layer is isolated from the other layers by the separation layers.

Miniaturized cantilever probe for scanning probe microscopy and fabrication thereof

A method of producing a probe device for a metrology instrument such as an AFM includes providing a substrate and forming a tip stock extending upwardly from the substrate. The tip stock is preferably FIB milled to form a tip of the probe device. The tip preferably has a high aspect ratio, with a height that is at least about 1 micron for performing critical dimension (e.g., deep trench) atomic force microscopy. The stock is preferably pedestal shaped having a distal end that is substantially planar which can be machined into a tip in at least less than about 2 minutes. With the preferred embodiments, the FIB milling step can be completed in substantially fewer and less complicated steps than known techniques to produce a high aspect ratio tip suitable for DT-AFM in less than about one minute.

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Thousand Oaks, CA, United States of America

Weijie Wang