Nagaoka University of Technology

Gigaphoton Inc.

Mitsubishi Electric Corporation

Weihua Jiang

Hiroshi Umeda

Yasutaka Inanaga

Gaku Oinuma

Koji Kakizaki

Teruki Naito

A high-voltage pulse generation device configured to apply a pulsed high voltage to the space between a pair of discharge electrodes disposed in a laser chamber of a gas laser apparatus includes n transformer cores that form a transformer, where n is a natural number greater than or equal to two, n primary electric circuits of the transformer, the n primary electric circuits each having a first terminal connected to a reference potential and a second terminal connected to a charger, the n primary electric circuits each including one or more primary coils, one or more diodes connected in parallel to the one or more primary coils, and one or more pulse generators connected in parallel to the one or more primary coils, and a secondary electric circuit of the transformer, the secondary electric circuit including a secondary coil and connected to the pair of discharge electrodes.

High-voltage pulse generator, gas laser apparatus, and method for manufacturing electronic device

A high voltage pulse generation device includes n transformer cores configuring a transformer, n being a natural number of 2 or more, each of the n transformer cores being configured to form a magnetic circuit along a first plane and to have a width in a first direction parallel to the first plane larger than a width in a second direction parallel to the first plane and perpendicular to the first direction; n primary electric circuits of the transformer connected in parallel to each other, each of the n primary electric circuits including at least one primary coil, and m pulse generation units connected in parallel to the at least one primary coil, m being a natural number equal to or more than 2; and a secondary electric circuit of the transformer including a secondary coil and connected to a pair of discharge electrodes.

High voltage pulse generation device, gas laser apparatus, and electronic device manufacturing method

One of the purposes is to provide a pulse discharge power supply for use in generating pulse discharge. The pulse discharge power supply includes a pulse generation unit, a control circuit, an electric current detector and an electric current signal processing unit. The pulse generation unit generates a first pulse, and applies it to a discharge load for generating pulse discharge. The electric current detector detects an electric current flowing into the discharge load in accordance with the application of the pulse. The electric current signal processing unit outputs into the control circuit a signal based on an integration result of the electric current having been detected. The control circuit controls the generation of a second pulse in the pulse generation unit based on the signal being received.

Pulse discharge power supply and pulse discharge generating method

Growing community of inventors

Nagaoka, Japan

Weihua Jiang