Betone Technology Shanghai, Inc.

Weicong Song

Xiaoliang Jin

Xueqin Pan

Wenjun Xie

A chemical vapor deposition device capable of reciprocating rotation and lifting is provided. The chemical vapor deposition device includes a cavity, a base, a fixing bracket, a lifting mechanism, and a rotation mechanism. The present disclosure utilizes the principle of magnetic-fluid sealing to achieve device sealing and integrates the rotation and lifting functions, satisfying the coordinated work of reciprocating rotation, lifting movement, wafer heating, etc. at the same time without affecting each other. Moreover, the problem of physical entanglement and damage of electrical wires during the rotation process has been avoided, and micro-particles formed in the cavity will not affect the rotation mechanism, thereby enabling the efficient and stable operation of the rotation mechanism. The present disclosure has fewer transmission components, which reduces instability and mechanical wear caused by redundant components, improves the accuracy and stability of lifting and rotation control, and minimizes manufacturing costs and power consumption.

Chemical vapor deposition device capable of reciprocating rotation and lifting

A vapor deposition device capable of reciprocating rotation and lifting is disclosed. The vapor deposition device includes a vapor deposition cavity, a base station, a base shaft, a telescopic assembly, a passive lifting rotation member, a rotation mechanism, and a lifting mechanism. The rotation mechanism is fixedly connected with the telescopic assembly, and configured to drive the telescopic assembly to perform a reciprocating rotational motion, which in turn drives the base station, the base shaft, and the passive lifting rotation member to perform a reciprocating rotational motion in sequence. The lifting mechanism is rotatably and slidably connected with the passive lifting rotation member, and configured to drive the passive lifting rotation member to move up and down, which in turn drives the base shaft and the base station to move up and down. The telescopic assembly extends when the base station ascends and shortens when the base station descends.

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Shanghai, China

Weicong Song