International Business Machines Corporation

Shanghai Huali Microelectronics Corporation

Wei Zuo

Shi Kun Li

Di Li Hu

Ka Lin

Lin Fu

Lei Deng

Zhe Wang

Jingxun Fang

Jing Wen

Chuanmin Zhang

Xiaogang Tong

Embodiments of the present invention provide efficient and automatic systems and methods for regulating the viewing posture of a user. Embodiments of the present invention can be used to regulate the viewing posture of both juveniles and adults, by providing real-time data analysis of a viewing distance and viewing angle of a device, and generating feedback to a user related to their current viewing posture, while also providing increased supervision of the viewing posture of juvenile device users.

Detection of improper viewing posture

A fabrication method for improving surface planarity after tungsten chemical mechanical polishing (W-CMP) is disclosed. The method forms contact holes and dummy patterns by performing two respective photolithography-and-etching processes to ensure that the dummy patterns have a depth smaller than that of the contact holes. Then the method fills tungsten into the contact holes and dummy patterns and removes the redundant tungsten by a W-CMP process. With such a method, difference of wiring density between areas can be reduced by the dummy patterns, and hence a better surface planarity of the contact hole layer can be achieved. Besides, as the dummy patterns are formed in a pre-metal dielectric layer and their depth is well controlled, tungsten filled in the dummy patterns will not contact with the device area below the pre-metal dielectric layer, and thus will not affect the performance of the device.

Fabrication method for improving surface planarity after tungsten chemical mechanical polishing

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Shanghai, China

Wei Zuo