Gudeng Precision Industrial Co., Ltd.

Wei-Yen Chen

Ming-Chien Chiu

Chia-Ho Chuang

Cheng-Hsin Chen

Cheng-Ju Lee

Tien-Jui Lin

Kuan-Chun Liu

Long-Ming Lu

A vertical fixing transmission box used for transmitting a container is disclosed. The transmission box includes a carrier substrate and an elastic component, wherein the carrier substrate is utilized to carry the container, and the elastic component may be switched between an opening state and a fixing state. When the container is carried by the carrier substrate and the elastic component is switched to the opening state, the elastic component provides a vertical elastic force to abut against the container downwardly and fix the container. Also, the transmission box may be transported by an automatic material handling system.

Vertical fixing transmission box and transmission method using the same

The present invention relates to an EUV pod having marks, which comprises a mask pod and one or more mark disposed on the mask pod. One or more sensor of a processing machine is used for detecting the one or more mark. By including the one or more mark, the surface roughness of one or more region of the mask pod detectable by the one or more sensor can be altered. The one or more sensor emits light to the mask pod, which reflects the light to the one or more sensor. The one or more sensor receives the reflection light from the mask pod and judges if the voltage generated by the reflection light falls within the reflection ranges of the mark. Thereby, whether the one or more sensor corresponds to the one or more make can be confirmed.

Extreme ultraviolet (EUV) pod having marks

Growing community of inventors

Taipei, Taiwan

Wei-Yen Chen