Sensortek Technology Corp.

Sitronix Technology Corporation

Wei-Yang Ou

Hsin-Hung Huang

Ming-Huang Liu

Hung-Sen Chen

A manufacturing method for a Micro-Electro-Mechanical Systems (MEMS) structure includes implementing a surface modification process, to form a transformation layer on the surfaces of the MEMS structure; implementing an anti-stiction coating pre-clean process, to clean the transformation layer on the surfaces towards a particular direction; and implementing an anti-stiction coating process, to coat a monolayer on the surfaces of the MEMS structure.

Manufacturing method of micro-electro-mechanical systems device

A method of detecting whether a microelectromechanical system (MEMS) device is hermetic includes applying at least three voltage differences between a movable part and a sensor electrode of the MEMS device to measure at least three effective capacitances, calculating a capacitance-to-voltage curve and an offset voltage of the MEMS device according to the at least three effective capacitances; and determining whether the offset voltage is within a predetermined range to determine whether MEMS device is hermetic.

Method of detecting whether microelectromechanical system device is hermetic

The present invention provides an analog-to-digital converter, which comprises an integration circuit, a threshold signal generating circuit, a main comparison circuit, a sub comparison circuit, a counter, and a decoder. The integration circuit integrates an input signal and produces an integration signal. The threshold signal generating circuit generates a main threshold signal and a plurality of sub threshold signals. The main comparison circuit produces a plurality of main comparison signals according the integration signal and the main threshold signal. The sub comparison circuit produces a plurality of sub comparison signals according to the integration signal and the plurality of sub threshold signals. The counter counts the plurality of main comparison signals and produces a first counting signal. The decoder decodes the plurality of sub comparison signals and produces a second count signal. The first count signal and the second count signal are used for producing a digital signal.

Growing community of inventors

Hsinchu County, Taiwan

Wei-Yang Ou