Average Co-Inventor Count = 7.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Taiwan Semiconductor Manufacturing Comp. Ltd. (2 from 40,927 patents)
2 patents:
1. 10879135 - Overlay error and process window metrology
2. 10510623 - Overlay error and process window metrology