National Cheng-Kung University

Foresight Technology Company, Ltd.

Wei-Ming Wu

Fan-Tien Cheng

Chi-An Kao

A method for screening samples for building a prediction model and a computer program product thereof are provided. When a set of new sample data is added to a dynamic moving window (DMW), a clustering step is performed with respect to all of the sets of sample data within the window for grouping the sets of sample data with similar properties as one group. If the number of the sets of sample data in the largest group is greater than a predetermined threshold, it means that there are too many sets of sample data with similar properties in the largest group, and the oldest sample data in the largest group can be deleted; if smaller than or equal to a predetermined threshold, it means that the sample data in the largest group are quite unique, and should be kept for building or refreshing the prediction model.

Method for screening samples for building prediction model and computer program product thereof

An advanced process control (APC) system, an APC method, and a computer program product, which, when executed, performs an APC method are provided for incorporating virtual metrology (VM) into APC. The present inventions uses a reliance index (RI) and a global similarity index (GSI) to adjust at least one controller gain of a run-to-run (R2R) controller when the VM value of a workpiece is adopted to replace the actual measurement value of the workpiece. The RI is used for gauging the reliability of the VM value, and the GSI is used for assessing the degree of similarity between the set of process data for generating the VM value and all the sets of historical process data used for building the conjecturing model.

Growing community of inventors

Tainan, Taiwan

Wei-Ming Wu