Vanguard International Semiconductor Corporation

Wei-Lun Hsia

Hsiao-Ying Yang

Chun-Hsien Lin

A semiconductor structure includes a conductive feature on a substrate. A plurality of first dielectric layers are disposed on the conductive feature, and stress directions of at least two of the first dielectric layers are different from one another. A first hole penetrates through the plurality of the first dielectric layers to expose the conductive feature. A first conductive plug conformally covers the first hole and is electrically connected to the conductive feature. A first insulating plug on the first conductive plug fills the first hole.

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Hsinchu, Taiwan

Wei-Lun Hsia