Taiwan Semiconductor Manufacturing Comp. Ltd.

Wei-Kang Tu

Shih-Chung Chen

Chun Yan Chen

Ching-Wen Cheng

A system and method for chemical mechanical polishing ('CMP') pad replacement on a CMP processing tool. A platen carrier having two or more platens is positioned within a platen cleaning process module. Each platen includes a CMP pad affixed thereto, and is capable of being independently rotated during operations. When a pad requires replacement, the platen carrier rotates towards a pad tearer tool, which extends and pivots to remove the used pad from the platen as the carrier rotates. A pad tape replacement module is positioned above the CMP tool with pad tape extending from a supply roll to a recycle roll. As the pad tape transits through the module, a backing of the tape is separated and recycled. A pad disposed in the pad tape is then applied to a platen via a pressure roller.

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Hsinchu, Taiwan

Wei-Kang Tu