Kla Corporation

Wei Kang

Tong Huang

Xuguang Jiang

Ashok Varadarajan

Faisal Omer

Yiyu Zhang

N R Girish

Vadim Romanovski

Methods and systems for setting up alignment of a specimen are provided. One system includes computer subsystem(s) configured for acquiring two-dimensional (2D) images generated from output of a detector of an output acquisition subsystem at template locations in corresponding areas of printed instances on a specimen. The computer subsystem(s) determine offsets in x and y directions between the template locations using the 2D images and determine an angle of the specimen with respect to the output acquisition subsystem based on the offsets. If the angle is greater than a predetermined value, the computer subsystem(s) rotate the specimen and repeat the steps described above. If the angle is less than the predetermined value, the computer subsystem(s) store one of the 2D images for alignment of the specimen in a process performed on a specimen. The 2D images may include multi-mode images, which may be fused prior to determining the offsets.

Alignment of a specimen for inspection and other processes

Growing community of inventors

Fremont, CA, United States of America

Wei Kang