Epistar Corporation

Wei-ching Guo

Ta-Cheng Hsu

Wei-Shou Chen

Chung-jen Chung

Wei-Tsuen Ye

Chun-Yi Lin

An acoustic wave element includes: a substrate; a bonding structure on the substrate; a support layer on the bonding structure; a first electrode including a lower surface on the support layer; a cavity positioned between the support layer and the first electrode and exposing a lower surface of the first electrode; a piezoelectric layer on the first electrode; and a second electrode on the piezoelectric layer, wherein at least one of the first electrode and the second electrode includes a first layer and a second layer that the first layer has a first acoustic impedance and a first electrical impedance, the second layer has a second acoustic impedance and a second electrical impedance, wherein the first acoustic impedance is higher than the second acoustic impedance, and the second electrical impedance is lower than the first electrical impedance.

Growing community of inventors

Hsinchu, Taiwan

Wei-ching Guo