Taiwan Semiconductor Manufacturing Comp. Ltd.

Wei-Cheng Lee

Yu-Ching Chang

Kuo-Yen Liu

Ming-Tzung Hsu

Wen-Chen Chien

Long-Chun Tsai

Biing-Huang Yang

Yu-Da Fan

Within a method for forming a microelectronic fabrication there is provided a substrate having formed thereover a patterned dielectric layer which defines a via. There is also formed within a lower portion of the via a tungsten stud layer having a recess thereabove within the via. There is also formed within the recess a patterned conductor capping layer formed of a conductor material other than tungsten. The patterned conductor capping layer may seal a void formed within the tungsten stud layer.

Tungsten plug with conductor capping layer

Within an apparatus for storing a liquid, there is first included a storage tank. The storage tank has formed integral thereto and in fluid communication therewith a liquid inlet port and a liquid outlet port. The storage tank also has formed integral thereto and in fluid communication therewith a gas inlet port and a gas outlet port. Finally, the gas outlet port has connected thereto and in fluid communication therewith a floating plug valve. The floating plug valve comprises a first plug movably positioned over and sealing a first aperture within the floating plug valve such that a first weight of the first plug and a first area of the first aperture define an upper operating pressure of a gas introduced into the storage tank through the gas inlet port. The apparatus of the present invention also contemplates a floating plug valve employed within the apparatus of the present invention.

Floating plug valve apparatus for storing and dispensing high purity liquid

Growing community of inventors

Taipei, Taiwan

Wei-Cheng Lee