Taiwan Semiconductor Manufacturing Comp. Ltd.

Synergy Scientech Corp.

Wei-Chen Wu

Xiaomeng Chen

Shih-Chang Wang

Yung-Cheng Lin

Pei-Chao Su

Kuang-Shing Chen

Chien-Huei Chen

Hung-Yi Chung

Chien-An Lin

Chan-Ming Chang

Shih-Yung Chen

Li-Jou Lee

Pei-Jen Wang

Shun-Ming Huang

A hot spot defect detecting method and a hot spot defect detecting system are provided. In the method, hot spots are extracted from a design of a semiconductor product to define a hot spot map comprising hot spot groups, wherein local patterns in a same context of the design yielding a same image content are defined as a same hot spot group. During runtime, defect images obtained by an inspection tool performing hot scans on a wafer manufactured with the design are acquired and the hot spot map is aligned to each defect image to locate the hot spot groups. The hot spot defects in each defect image are detected by dynamically mapping the hot spot groups located in each defect image to a plurality of threshold regions and respectively performing automatic thresholding on pixel values of the hot spots of each hot spot group in the corresponding threshold region.

Hot spot defect detecting method and hot spot defect detecting system

An electricity storage device and a portable electric-powered tool. The device comprises at least a battery; at least a super capacitor, which has lower internal impedance, when fully charged, than that of the battery and connects the battery in parallel; and an output end for supplying the electricity. The super capacitor is the major power supply for the pulse current output; the battery is used for generating electricity to the super capacitor and is the secondary power supply for the pulse current output. The connection of the battery and the super capacitor does not need any converters or current-limiting resistors.

Electrical energy storage device

Growing community of inventors

Hsinchu, Taiwan

Wei-Chen Wu