Air Products and Chemicals, Inc.

International Business Machines Corporation

Btu International, Inc.

Other

Versum Materials Us, LLC

International Coal Refining Company

Wayne Thomas McDermott

Alexander Schwarz

Richard Carl Ockovic

Chun Christine Dong

Richard E Patrick

Gregory Khosrov Arslanian

Ronald Martin Pearlstein

Gary A Orbeck

Jin J Wu

Donald A Seccombe, Jr

Dean Van-John Roth

Philip Bruce Henderson

John Giles Langan

Daniel Joseph Tempel

Douglas W Cooper

Hoshang Subawalla

Henry L Wolfe

Rakesh Agrawal

Manchao Xiao

Diwakar Garg

Vladimir Yliy Gershtein

Edwin N Givens

Andrew David Johnson

Thomas Hsiao-Ling Hsiung

Gene Everad Parris

John Frederick Cirucci

John C Ivankovits

James Joseph Hart

Julian A McDermott

Brenda Faye Ross

Agnes Derecskei-Kovacs

Sai-Hong Andrew Lo

David H Ying

Allison Barbeau Hopkins

Robert William Wimmer, Ii

Jewel Verde

Joseph J Siemer

Philip E Behm

Matthew David Bernard

Michael Altschul Pingitore

Rosaleen Patricia Morris-Oskanian

Embodiments of the present invention provide a system and method to perform drying and testing of organometallic and organosilane precursor source ampoules that have been cleaned for re-use. The drying and quality control testing is performed in a single location with a single apparatus requiring only one manual connection/disconnection step of the ampoule to the apparatus. The testing includes analyses for residual moisture, entrained particulate matter, differential pressure, and helium leak checking.

System and method for drying and analytical testing of containers

An apparatus and a method comprising same for removing metal oxides from a substrate surface are disclosed herein. In one particular embodiment, the apparatus comprises an electrode assembly that has a housing that is at least partially comprised of an insulating material and having an internal volume and at least one fluid inlet that is in fluid communication with the internal volume; a conductive base connected to the housing comprising a plurality of conductive tips that extend therefrom into a target area and a plurality of perforations that extend therethrough and are in fluid communication with the internal volume to allow for a passage of a gas mixture comprising a reducing gas.

Electrode assembly for the removal of surface oxides by electron attachment

The present invention provides a method and apparatus for the dry fluxing of at least one component and/or solder surface via electron attachment. In one embodiment, there is provided a method for removing oxides from the surface of a component comprising: providing a component on a substrate wherein the substrate is grounded or has a positive electrical potential to form a target assembly; passing a gas mixture comprising a reducing gas through an ion generator comprising a first and a second electrode; supplying an amount of voltage to at least one of the first and second electrodes sufficient to generate electrons wherein the electrons attach to at least a portion of the reducing gas and form a negatively charged reducing gas; and contacting the target assembly with the negatively charged reducing gas to reduce the oxides on the component.

Apparatus for removal of surface oxides via fluxless technique involving electron attachment and remote ion generation

The present invention is a container and a processing for passivating the internal surface of the container to store monochlorosilane in a stable manner without degradation of the monochlorosilane. Various container surface modifications have been identified to reduce surface reactions to acceptable levels. Some of the described surface modifications result in significant reduction in monochlorosilane instability.

Cylinder surface treated container for monochlorosilane

The present invention relates to a method for removing metal oxides from a substrate surface. In one particular embodiment, the method comprises: providing a substrate, a first, and a second electrode that reside within a target area; passing a gas mixture comprising a reducing gas through the target area; supplying an amount of energy to the first and/or the second electrode to generate electrons within the target area wherein at least a portion of the electrons attach to a portion of the reducing gas and form a negatively charged reducing gas; and contacting the substrate with the negatively charged reducing gas to reduce the metal oxides on the surface of the substrate.

Removal of surface oxides by electron attachment for wafer bumping applications

Apparatus and method for removal of surface oxides via fluxless technique involving electron attachment and remote ion generation

A system and method for measuring and analyzing particles within a gas feed stream. In one aspect, the system includes a particle counter and a particle capture filter that are arranged in parallel. In another aspect, the system includes a purifying device to remove trace molecular impurities from a gas feed stream to reduce the presence of impurities.

System and method comprising same for measurement and/or analysis of particles in gas stream

The invention relates to an improvement in apparatus and process for the formation of a complex of Lewis acidic or Lewis basic gases in a reactive liquid of opposite character and for the breaking (fragmentation) of said complex associated with the recovery of the Lewis gas therefrom. The improvement resides in forming finely divided droplets of reactive liquid and controlling the temperature, pressure and concentration of said Lewis gas of opposite character to provide for (a) the formation of said complex between said gas and reactive liquid or (b) the breaking of said complex and the recovery of the atomized droplets of reactive liquid.

Contact methods for formation of Lewis gas/liquid systems and recovery of Lewis gas therefrom

The invention relates to an improvement in apparatus and process for effecting storage and delivery of a gas. The storage and delivery apparatus is comprised of a storage and dispensing vessel containing a medium capable of storing a gas and permitting delivery of the gas stored in the medium from the vessel, the improvement comprising:

Wick systems for complexed gas technology

Ultrasonic probe comprising an elongate body having a first end and a second end, an ultrasonic transducer attached to the probe at or adjacent the first end, and an enlarged support section intermediate the ultrasonic transducer and the second end, wherein the enlarged support section has an equivalent diameter greater than an equivalent diameter of the body at any location between the enlarged support section and the ultrasonic transducer. The probe may be used to introduce ultrasonic energy into ultrasonic cleaning systems.

Transmission of ultrasonic energy into pressurized fluids

Method for processing an article by contacting the article with a dense fluid. The article is introduced into a sealable processing chamber and the processing chamber is sealed. A dense fluid is prepared by introducing a subcritical fluid into a pressurization vessel and isolating the vessel, and then heating the subcritical fluid at essentially constant volume and essentially constant density to yield a dense fluid. At least a portion of the dense fluid is transferred from the pressurization vessel to the processing chamber, wherein the transfer of the dense fluid is driven by the difference between the pressure in the pressurization vessel and the pressure in the processing chamber, thereby pressurizing the processing chamber with transferred dense fluid. The article is contacted with the transferred dense fluid to yield a spent dense fluid and a treated article, and the spent dense fluid is separated from the treated article.

Dense phase processing fluids for microelectronic component manufacture

Growing community of inventors

Fogelsville, PA, United States of America

Wayne Thomas McDermott